SiCOH DIELECTRIC
PATEL VISHNUBHAI V, AFZALI-ARDAKANI ALI, NGUYEN SON, GATES STEPHEN M, GRILL ALFRED, NEUMAYER DEBORAH A
Year of Publication 30.10.2008
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Year of Publication 30.10.2008
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BEOL interconnect structures with improved resistance to stress
NGUYEN SON V, LIU XIAO H, WIDODO JOHNNY, SHAW THOMAS M, GATES STEPHEN M, KIM JAE H, DIMITRAKOPOULOS CHRISTOS D, RESTAINO DARRYL D, LANE MICHAEL W, BONILLA GRISELDA
Year of Publication 07.12.2010
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Year of Publication 07.12.2010
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Low K and ultra low K SiCOH dielectric films and methods to form the same
Gates, Stephen M, Dimitrakopoulos, Christos D, Grill, Alfred, Nguyen, Son Van
Year of Publication 16.10.2007
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Year of Publication 16.10.2007
Patent
Low K and ultra low K SiCOH dielectric films and methods to form the same
GATES STEPHEN M, DIMITRAKOPOULOS CHRISTOS D, GRILL ALFRED, NGUYEN SON VAN
Year of Publication 16.10.2007
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Year of Publication 16.10.2007
Patent
RELIABLE BEOL INTEGRATION PROCESS WITH DIRECT CMP OF POROUS SiCOH DIELECTRIC
MCGAHAY VINCENT J, MEHTA SANJAY C, GATES STEPHEN M, DIMITRAKOPOULOS CHRISTOS D
Year of Publication 04.10.2007
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Year of Publication 04.10.2007
Patent
Materials containing voids with void size controlled on the nanometer scale
PATEL VISHNUBHAI V, NGUYEN SON, GATES STEPHEN M, GRILL ALFRED, NEUMAYER DEBORAH A
Year of Publication 23.08.2007
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Year of Publication 23.08.2007
Patent
Reliable BEOL integration process with direct CMP of porous SiCOH dielectric
MCGAHAY VINCENT J, MEHTA SANJAY C, GATES STEPHEN M, DIMITRAKOPOULOS CHRISTOS D
Year of Publication 07.08.2007
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Year of Publication 07.08.2007
Patent
Reliable BEOL integration process with direct CMP of porous SiCOH dielectric
Dimitrakopoulos, Christos D, Gates, Stephen M, McGahay, Vincent J, Mehta, Sanjay C
Year of Publication 07.08.2007
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Year of Publication 07.08.2007
Patent
SiCOH dielectric
PATEL VISHNUBHAI V, AFZALI-ARDAKANI ALI, NGUYEN SON, GATES STEPHEN M, GRILL ALFRED, NEUMAYER DEBORAH A
Year of Publication 26.07.2007
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Year of Publication 26.07.2007
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Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same
Colburn, Matthew E, Gates, Stephen M, Hedrick, Jeffrey C, Huang, Elbert, Nitta, Satyanarayana V, Purushothaman, Sampath, Sankarapandian, Muthumanickam
Year of Publication 03.02.2009
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Year of Publication 03.02.2009
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Hardmask for improved reliability of silicon based dielectrics
LIU XIAO H, MCGAHAY VINCENT J, LANE MICHAEL, MEHTA SANJAY C, SHAW THOMAS M, GATES STEPHEN M, NGUYEN SON VAN
Year of Publication 03.02.2009
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Year of Publication 03.02.2009
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Hardmask for improved reliability of silicon based dielectrics
Nguyen, Son Van, Lane, Michael, Gates, Stephen M, Liu, Xiao H, McGahay, Vincent J, Mehta, Sanjay C, Shaw, Thomas M
Year of Publication 03.02.2009
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Year of Publication 03.02.2009
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