Ultra low κ plasma enhanced chemical vapor deposition processes using a single bifunctional precursor containing both a SiCOH matrix functionality and organic porogen functionality
Nguyen, Son Van, Gates, Stephen McConnell, Neumayer, Deborah A, Grill, Alfred
Year of Publication 17.01.2012
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Year of Publication 17.01.2012
Patent
Ultra low plasma enhanced chemical vapor deposition processes using a single bifunctional precursor containing both a SiCOH matrix functionality and organic porogen functionality
NGUYEN SON VAN, NEUMAYER DEBORAH A, GRILL ALFRED, GATES STEPHEN MCCONNELL
Year of Publication 17.01.2012
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Year of Publication 17.01.2012
Patent