LITHOGRAPHIC APPARATUS
ARLEMARK, Erik, HEMSCHOOTE, Dries, LEROUX, Alain, YOUSEFI MOGHADDAM, Mehdi, SCHIMMEL, Hendrikus, GASSELING, Paulus, HOFMAN, Johannes, RANJAN, Manish
Year of Publication 06.12.2018
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Year of Publication 06.12.2018
Patent
Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient
PEKELDER SVEN, SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS, NIENHUYS HAN-KWANG, JANSSEN FRANCISCUS JOHANNES JOSEPH, HUIJBERTS ALEXANDER MARINUS ARNOLDUS, GASSELING PAULUS ALBERTUS MARIA
Year of Publication 03.03.2015
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Year of Publication 03.03.2015
Patent
Lithographic apparatus and method of manufacturing a device
Mallmann Hans Joerg, Scaccabarozzi Luigi, Luijten Carlo Cornelis Maria, Banine Vadim Yevgenyevich, Bal Kurstat, Gasseling Paulus Albertus Maria, Van Kampen Maarten, Yakunin Andrei Mikhailovich, Huijberts Alexander Marinus Arnoldus, Rizo Diago Pedro Julian, Minnaert Arthur Winfried Eduardus, Nienhuys Han-Kwang, Muitjens Marcel Johannus Elisabeth Hubertus, Van Aerle Nicolaas Aldegonda Jan Maria
Year of Publication 28.03.2017
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Year of Publication 28.03.2017
Patent
LITHOGRAPHIC APPARATUS AND COMPONENT
PEKELDER SVEN, SCHMITZ ROGER, NIENHUYS HAN-KWANG, HUIJBERTS ALEXANDER MARINUS ARNOLDUS, GASSELING PAULUS ALBERTUS MARIA, JANSSEN FRANCISCUS
Year of Publication 27.11.2012
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Year of Publication 27.11.2012
Patent
Lithographic Apparatus and Method of Manufacturing a Device
MINNAERT ARTHUR WINFRIED EDUARDUS, VAN KAMPEN MAARTEN, YAKUNIN ANDREI MIKHAILOVICH, BAL KURSTAT, HUIJBERTS ALEXANDER MARINUS ARNOLDUS, GASSELING PAULUS ALBERTUS MARIA, SCACCABAROZZI LUIGI, BANINE VADIM YEVGENYEVICH, RIZO DIAGO PEDRO JULIAN, MALLMANN HANS JOERG, NIENHUYS HAN-KWANG, MUITJENS JOHANNUS ELISABETH HUBERTUS, VAN AERLE NICOLAAS ALDEGONDA JAN MARIA, LUIJTEN CARLO CORNELIS MARIA
Year of Publication 09.07.2015
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Year of Publication 09.07.2015
Patent
LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING A DEVICE
GASSELING, PAULUS, VAN AERLE, NICK, NIENHUYS, HAN-KWANG, MUITJENS, MARCEL, HUIJBERTS, ALEXANDER, SCACCABAROZZI, LUIGI, BAL, KURSAT, VAN KAMPEN, MAARTEN, MALLMANN, HANS, LUIJTEN, CARLO, MINNAERT, ARTHUR, BANINE, VADIM, YAKUNIN, ANDREI, RIZO DIAGO, PEDRO
Year of Publication 06.02.2014
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Year of Publication 06.02.2014
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LITHOGRAPHIC APPARATUS AND METHOD
RIZO DIAGO PEDRO, BANINE VADIM, BAL KURSAT, AERLE NICK, LUIJTEN CARLO, MALLMANN HANS, HUIJBERTS ALEXANDER, KAMPEN MAARTEN, MINNAERT ARTHUR, SCACCABAROZZI LUIGI, YAKUNIN ANDREI, GASSELING PAULUS, MUITJENS MARCEL, NIENHUYS HAN-KWANG
Year of Publication 04.02.2014
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Year of Publication 04.02.2014
Patent
Lithographic apparatus and method
LUIJTEN, CARLO CORNELIS MARIA, NIENHUYS, HAN-KWANG, BANINE, VADIM YEVGENYEVICH, MINNAERT, ARTHUR WINFRIED EDUARDUS, MUITJENS, MARCEL JOHANNUS ELISABETH HUBERTUS, RIZO DIAGO, PEDRO JULIAN, YAKUNIN, ANDREI MIKHAILOVICH, GASSELING, PAULUS ALBERTUS MARIA, SCACCABAROZZI, LUIGI, BAL, KURSAT, VAN KAMPEN, MAARTEN, MALLMANN, HANS JOERG, HUIJBERTS, ALEXANDER MARINUS ARNOLDUS, VAN AERLE, NICOLAAS ALDEGONDA JAN MARIA
Year of Publication 21.09.2017
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Year of Publication 21.09.2017
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Lithographic apparatus and method
LUIJTEN, CARLO CORNELIS MARIA, NIENHUYS, HAN-KWANG, BANINE, VADIM YEVGENYEVICH, MINNAERT, ARTHUR WINFRIED EDUARDUS, MUITJENS, MARCEL JOHANNUS ELISABETH HUBERTUS, RIZO DIAGO, PEDRO JULIAN, YAKUNIN, ANDREI MIKHAILOVICH, GASSELING, PAULUS ALBERTUS MARIA, SCACCABAROZZI, LUIGI, BAL, KURSAT, VAN KAMPEN, MAARTEN, MALLMANN, HANS JOERG, HUIJBERTS, ALEXANDER MARINUS ARNOLDUS, VAN AERLE, NICOLAAS ALDEGONDA JAN MARIA
Year of Publication 16.03.2014
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Year of Publication 16.03.2014
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