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Year of Publication 09.02.2023
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Year of Publication 30.06.2023
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Year of Publication 17.07.2024
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Modular microwave source with multiple metal housings
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Year of Publication 09.07.2024
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Year of Publication 09.07.2024
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SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
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Year of Publication 15.08.2024
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Shunt door for magnets in plasma process chamber
Dhanakshirur, Akshay, Kumar, Bhaskar, Bera, Kallol, Franklin, Timothy Joseph, Alayavalli, Kaushik, Garner, Stephen C, Ganta, Sathya Swaroop
Year of Publication 16.04.2024
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Year of Publication 16.04.2024
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MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS
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Year of Publication 19.04.2023
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Year of Publication 19.04.2023
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Year of Publication 18.01.2024
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Year of Publication 18.01.2024
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MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS
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Year of Publication 16.12.2021
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Year of Publication 16.12.2021
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METHOD AND APPARATUS WITH HIGH CONDUCTANCE COMPONENTS FOR CHAMBER CLEANING
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Year of Publication 03.11.2022
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Year of Publication 03.11.2022
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Magnetic-material shield around plasma chambers near pedestal
Pinson, II, Jay D, Dhanakshirur, Akshay, Alayavalli, Kaushik Comandoor, Duan, Ren-Guan, Bera, Kallol, Konnoth Joseph, Job George, Pandey, Abhishek, Nguyen, Andrew, Kalal, Anil Kumar, Sun, Jennifer Y, Ganta, Sathya Swaroop, Lai, Canfeng
Year of Publication 14.05.2024
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Year of Publication 14.05.2024
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SHUNT DOOR FOR MAGNETS IN A PLASMA CHAMBER
GANTA, Sathya Swaroop, FRANKLIN, Timothy Joseph, DHANAKSHIRUR, Akshay, BERA, Kallol, ALAYAVALLI, Kaushik, KUMAR, Bhaskar, GARNER, Stephen C
Year of Publication 02.09.2021
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Year of Publication 02.09.2021
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SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
GANTA, Sathya Swaroop, FRANKLIN, Timothy Joseph, DHANAKSHIRUR, Akshay, BERA, Kallol, ALAYAVALLI, Kaushik, KUMAR, Bhaskar, GARNER, Stephen C
Year of Publication 02.09.2021
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Year of Publication 02.09.2021
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MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL
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Year of Publication 12.05.2022
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Year of Publication 12.05.2022
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