Parametric reliability test: wafer surface contamination study
Bersuker, G., Guan, J., Gale, G., Lysaght, P., Riley, D., Huff, H.R.
Published in IEEE International Integrated Reliability Workshop Final Report, 2002 (2002)
Published in IEEE International Integrated Reliability Workshop Final Report, 2002 (2002)
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Conference Proceeding
METHOD AND APPARATUS FOR COMBINED PARTICLE LOCATION AND REMOVAL
BRIGANTE, JEFFREY A, GALE, GLENN W, HEVEY, MAURICE R, KERN, FREDERICK W, KIM, BEN, SHARROW, JOEL M, SYVERSON, WILLIAM A
Year of Publication 22.11.2001
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Year of Publication 22.11.2001
Patent
Method for cleaning semiconductor devices
OKORN-SCHMIDT HARALD F, RATH DAVID L, ESTES SCOTT A, GALE GLENN W, JAGANNATHAN RANGARAJAN, COOPER EMANUEL I
Year of Publication 20.02.2001
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Year of Publication 20.02.2001
Patent
Capillary dry process and apparatus
SETTLEMYER, JR. KENNETH T, GALE GLENN WALTON, ARNDT RUSSELL H, SYVERSON WILLIAM A, KERN, JR. FREDERICK WILLIAM
Year of Publication 20.05.2003
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Year of Publication 20.05.2003
Patent
Method for cleaning semiconductor devices
JAGANNATHAN; RANGARAJAN, RATH; DAVID L, ESTES; SCOTT A, OKORN-SCHMIDT; HARALD F, COOPER; EMANUEL I, GALE; GLENN W
Year of Publication 05.10.1999
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Year of Publication 05.10.1999
Patent
Method and apparatus for combined particle location and removal
KIM BEN, BRIGANTE JEFFREY A, GALE GLENN W, SYVERSON WILLIAM A, HEVEY MAURICE R, KERN, JR. FREDERICK W, SHARROW JOEL M
Year of Publication 12.03.2002
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Year of Publication 12.03.2002
Patent
Method and apparatus for combined particle location and removal
Brigante, Jeffrey A, Gale, Glenn W, Hevey, Maurice R, Kern, Jr., Frederick W, Kim, Ben, Sharrow, Joel M, Syverson, William A
Year of Publication 12.03.2002
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Year of Publication 12.03.2002
Patent
Selective etching of silicate
OKORN-SCHMIDT HARALD F, RATH DAVID L, MADDEN KAREN P, MCCULLOUGH KENNETH J, GALE GLENN W, JAGANNATHAN RANGARAJAN, POPE KEITH R
Year of Publication 03.07.2001
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Year of Publication 03.07.2001
Patent
Method for manufacturing semiconductor device and manufacturing system
KUSHIBIKI MASATO, SHINDO NAOKI, KATO YOSHIHIRO, ASHIGAKI SHIGEO, NAKAMURA GENJI, HIROTA YOSHIHIRO, SHIMIZU AKITAKA, GLENN GALE, MURAKI YUSUKE
Year of Publication 25.03.2009
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Year of Publication 25.03.2009
Patent
Removal of silicon oxide
POPE; KEITH R, MADDEN; KAREN P, JAGANNATHAN; RANGARAJAN, RATH; DAVID L, MCCULLOUGH; KENNETH J, OKORN-SCHMIDT; HARALD F, GALE; GLENN W
Year of Publication 12.09.2000
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Year of Publication 12.09.2000
Patent
Process for treating a semiconductor substrate
SALGADO DARIO, OKORN-SCHMIDT HARALD F, GALE GLENN WALTON, MADDEN KAREN P, WUTHRICH RYAN WAYNE, ARNDT RUSSELL H, KERN, JR. FREDERICK WILLIAM, OUIMET, JR. GEORGE FRANCIS
Year of Publication 12.03.2002
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Year of Publication 12.03.2002
Patent
Method for manufacturing semiconductor device
KUSHIBIKI MASATO, SHINDO NAOKI, KATO YOSHIHIRO, ASHIGAKI SHIGEO, NAKAMURA GENJI, HIROTA YOSHIHIRO, SHIMIZU AKITAKA, GLENN GALE, MURAKI YUSUKE
Year of Publication 16.01.2008
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Year of Publication 16.01.2008
Patent
Process for treating a semiconductor substrate
SALGADO DARIO, OKORN-SCHMIDT HARALD F, GALE GLENN WALTON, MADDEN KAREN P, WUTHRICH RYAN WAYNE, ARNDT RUSSELL H, KERN, JR. FREDERICK WILLIAM, OUIMET, JR. GEORGE FRANCIS
Year of Publication 16.01.2001
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Year of Publication 16.01.2001
Patent
BERLIN (AND SHANGHAI) MEMORIES: Broward Metro Edition
PETER REICHE DENNIS E. GALE GLENN F. WOO Via e-mail Via e-mail Flemington, N.J.
Published in Sun-sentinel (Fort Lauderdale, Fla.) (12.12.1999)
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Published in Sun-sentinel (Fort Lauderdale, Fla.) (12.12.1999)
Newspaper Article
Waterloo City Centre: Between Past and Future: Final Edition
Project by Jed Braithwaite, Mark Gale, Glenn Man, Michael Mueller and Alex Tedesco
Published in Kitchener-Waterloo record (19.06.1999)
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Published in Kitchener-Waterloo record (19.06.1999)
Newspaper Article
Manufacturing method of semiconductor device
KUSHIBIKI, MASATO, GALE, GLENN, MURAKI, YUSUKE, SHINDO, NAOKI, HIROTA, YOSHIHIRO, SHIMIZU, AKITAKA, KATO, YOSHIHIRO, ASHIGAKI, SHIGEO, NAKAMURA, GENJI
Year of Publication 16.08.2006
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Year of Publication 16.08.2006
Patent