Enhancement of semiconductor wafer cleaning by chelating agent addition
GALE, Glenn W, RATH, David L, COOPER, Emanuel I, ESTES, Scott, OKORN-SCHMIDT, Harald F, BRIGANTE, Jeffrey, JAGANNATHAN, R, SETTEMBRE, Greg, ADAMS, Ed
Published in Journal of the Electrochemical Society (01.09.2001)
Published in Journal of the Electrochemical Society (01.09.2001)
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Journal Article
METHOD OF PROCESSING A WAFER
SYOMIN DENIS, GALE GLENN W, FU QIAN, WILCOXSON MARK H, MIKHAYLICHENKO KATRINA, LIU SHENJIAN
Year of Publication 27.10.2017
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Year of Publication 27.10.2017
Patent
An experimental study of megasonic cleaning of silicon wafers
BUSNAINA, A. A, KASHKOUSH, I. I, GALE, G. W
Published in Journal of the Electrochemical Society (01.08.1995)
Published in Journal of the Electrochemical Society (01.08.1995)
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Journal Article
Novel photoresist stripping technology using ozone/vaporized water mixture
Abe, H., Iwamoto, H., Toshima, T., Iino, T., Gale, G.W.
Published in IEEE transactions on semiconductor manufacturing (01.08.2003)
Published in IEEE transactions on semiconductor manufacturing (01.08.2003)
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Journal Article
Conference Proceeding
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SEMICONDUCTOR DEVICES
SYOMIN DENIS, GALE GLENN W, FU QIAN, WILCOXSON MARK H, MIKHAYLICHENKO KATRINA, LIU SHENJIAN
Year of Publication 11.10.2012
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Year of Publication 11.10.2012
Patent
Method and apparatus for pattern collapse free wet processing of semiconductor devices
SYOMIN DENIS, GALE GLENN W, FU QIAN, WILCOXSON MARK H, MIKHAYLICHENKO KATRINA, LIU SHENJIAN
Year of Publication 14.05.2013
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Year of Publication 14.05.2013
Patent
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SEMICONDUCTOR DEVICES
WILCOXSON, MARK H, MIKHAYLICHENKO, KATRINA, GALE, GLENN W, FU, QIAN, SYOMIN, DENIS, LIU, SHENJIAN
Year of Publication 30.08.2012
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Year of Publication 30.08.2012
Patent
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SEMICONDUCTOR DEVICES
WILCOXSON, MARK H, MIKHAYLICHENKO, KATRINA, GALE, GLENN W, FU, QIAN, SYOMIN, DENIS, LIU, SHENJIAN
Year of Publication 08.12.2011
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Year of Publication 08.12.2011
Patent
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SEMICONDUCTOR DEVICES
WILCOXSON, MARK H, MIKHAYLICHENKO, KATRINA, GALE, GLENN W, FU, QIAN, SYOMIN, DENIS, LIU, SHENJIAN
Year of Publication 04.08.2011
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Year of Publication 04.08.2011
Patent
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SEMICONDUCTOR DEVICES
SYOMIN DENIS, GALE GLENN W, FU QIAN, WILCOXSON MARK H, MIKHAYLICHENKO KATRINA, LIU SHENJIAN
Year of Publication 28.07.2011
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Year of Publication 28.07.2011
Patent
Method of processing a wafer used in fabricating semiconductor devices
WILCOXSON, MARK H, MIKHAYLICHENKO, KATRINA, GALE, GLENN W, FU, QIAN, SYOMIN, DENIS, LIU, SHENJIAN
Year of Publication 01.03.2016
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Year of Publication 01.03.2016
Patent
A SYSTEM AND METHOD FOR PROCESSING A SUBSTRATE USING SUPERCRITICAL CARBON DIOXIDE PROCESSING
GALE, GLENN, W, JACOBSON, GUNILLA, HILLMAN, JOSEPH, T, PALMER, BENTLEY
Year of Publication 19.01.2006
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Year of Publication 19.01.2006
Patent