Reticle Cooling by Non-Uniform Gas Flow
DELPUERTO Santiago E, WARD Christopher Charles, VOGEL Herman, SCHULTZ Geoffrey Alan, BURBANK Daniel Nathan, VAN BOKHOVEN Laurentius Johannes Adrianus, ONVLEE Johannes, VENTURINO Thomas, GALBURT Daniel Nicholas
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
Van Boxtel, Frank Johannes Jacobus, Alikhan, Abdullah, Schuster, Mark Josef, Ebert, Earl William, Onvlee, Johannes, Ward, Christopher Charles, Burbank, Daniel Nathan, Galburt, Daniel Nicholas, Verdirame, Justin Matthew, Nayfeh, Samir A, Delmastro, Peter A
Year of Publication 22.05.2018
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Year of Publication 22.05.2018
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
EBERT Earl William, SCHUSTER Mark Josef, WARD Christopher Charles, VERDIRAME Justin Matthew, ALIKHAN Abdullah, BURBANK Daniel Nathan, ONVLEE Johannes, NAYFEH Samir A, DELMASTRO Peter A, VAN BOXTEL Frank Johannes Jacobus, GALBURT Daniel Nicholas
Year of Publication 26.10.2017
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Year of Publication 26.10.2017
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Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
Van Boxtel Frank Johannes Jacobus, Alikhan Abdullah, Delmastro Peter A, Ebert Earl William, Nayfeh Samir A, Schuster Mark Josef, Burbank Daniel Nathan, Ward Christopher Charles, Verdirame Justin Matthew, Onvlee Johannes, Galburt Daniel Nicholas
Year of Publication 19.09.2017
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Year of Publication 19.09.2017
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RETICLE COOLING BY NON-UNIFORM GAS FLOW
BURBANK, DANIEL, NATHAN, DELPUERTO, SANTIAGO, E, VOGEL, HERMAN, ONVLEE, JOHANNES, WARD, CHRISTOPHER, CHARLES, SCHULTZ, GEOFFREY, VENTURINO, THOMAS, GALBURT, DANIEL, NICHOLAS, VAN BOKHOVEN, LAURENTIUS, JOHANNES, ADRIANUS
Year of Publication 07.07.2016
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Year of Publication 07.07.2016
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
EBERT Earl William, SCHUSTER Mark Josef, WARD Christopher Charles, VERDIRAME Justin Matthew, ALIKHAN Abdullah, BURBANK Daniel Nathan, ONVLEE Johannes, NAYFEH Samir A, DELMASTRO Peter A, VAN BOXTEL Frank Johannes Jacobus, GALBURT Daniel Nicholas
Year of Publication 08.06.2017
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Year of Publication 08.06.2017
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Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
Van Boxtel Frank Johannes Jacobus, Alikhan Abdullah, Delmastro Peter A, Nayfeh Samir A, Ebert, Jr. Earl William, Schuster Mark Josef, Burbank Daniel Nathan, Ward Christopher Charles, Verdirame Justin Matthew, Onvlee Johannes, Galburt Daniel Nicholas
Year of Publication 25.04.2017
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Year of Publication 25.04.2017
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Reticle cooling system in a lithographic apparatus
Van Boxtel Frank Johannes Jacobus, Alikhan Abdullah, Delmastro Peter A, Nayfeh Samir A, Venturino Thomas, Ebert, Jr. Earl William, Schuster Mark Josef, Burbank Daniel Nathan, Ward Christopher Charles, Verdirame Justin Matthew, Onvlee Johannes, Galburt Daniel Nicholas
Year of Publication 25.04.2017
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Year of Publication 25.04.2017
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
VAN BOXTEL FRANK JOHANNES JACOBUS, ALIKHAN ABDULLAH, SCHUSTER MARK JOSEF, DELMASTRO PETER A, WARD CHRISTOPHER CHARLES, NAYFEH SAMIR A, VERDIRAME JUSTIN MATTHEW, ONVLEE JOHANNES, GALBURT DANIEL NICHOLAS, EBERT, JR. EARL WILLIAM, BURBANK DANIEL NATHAN
Year of Publication 22.10.2015
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Year of Publication 22.10.2015
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Reticle Cooling System In A Lithographic Apparatus
VAN BOXTEL FRANK JOHANNES JACOBUS, ALIKHAN ABDULLAH, SCHUSTER MARK JOSEF, DELMASTRO PETER A, WARD CHRISTOPHER CHARLES, VENTURINO THOMAS, NAYFEH SAMIR A, VERDIRAME JUSTIN MATTHEW, ONVLEE JOHANNES, GALBURT DANIEL NICHOLAS, EBERT, JR. EARL WILLIAM, BURBANK DANIEL NATHAN
Year of Publication 27.08.2015
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Year of Publication 27.08.2015
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Reticle cooling by non-uniform gas flow
VOGEL, HERMAN, ONVLEE, JOHANNES, WARD, CHRISTOPHER CHARLES, DELPUERTO, SANTIAGO E, SCHULTZ, GEOFFREY, GALBURT, DANIEL NICHOLAS, VENTURINO, THOMAS, BURBANK, DANIEL NATHAN, VAN BOKHOVEN, LAURENTIUS JOHANNES ADRIANUS
Year of Publication 01.07.2017
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Year of Publication 01.07.2017
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Reticle cooling by non-uniform gas flow
VOGEL, HERMAN, ONVLEE, JOHANNES, WARD, CHRISTOPHER CHARLES, DELPUERTO, SANTIAGO E, SCHULTZ, GEOFFREY, GALBURT, DANIEL NICHOLAS, VENTURINO, THOMAS, BURBANK, DANIEL NATHAN, VAN BOKHOVEN, LAURENTIUS JOHANNES ADRIANUS
Year of Publication 01.10.2016
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Year of Publication 01.10.2016
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