DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
YE ZHIYUAN, CHU SCHUBERT S, RAO PREETHAM, BAUTISTA KEVIN JOSEPH, HILKENE MARTIN A, MYO NYI O, GAJENDRA PALAMURALI, SANCHEZ ERROL ANTONIO C, COLLINS RICHARD O, HOLMGREN DOUGLAS E, SHAH KARTIK
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Year of Publication 05.04.2024
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조절가능한 광원을 위한 장치
CHU SCHUBERT S, GIRIDHAR KAMESH, MYO NYI O, KUMAR NAVJOT, GAJENDRA PALAMURALI
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Year of Publication 24.10.2017
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웨이퍼 내의 퇴적 계곡들을 제거하기 위한 신규한 서셉터 설계
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Year of Publication 06.09.2017
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Year of Publication 06.09.2017
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에피 프로세스들을 위한 웨이퍼 가열을 위한 다이오드 레이저
YE ZHIYUAN, CHU SCHUBERT S, RAO PREETHAM, BAUTISTA KEVIN JOSEPH, HILKENE MARTIN A, MYO NYI O, GAJENDRA PALAMURALI, SANCHEZ ERROL ANTONIO C, COLLINS RICHARD O, HOLMGREN DOUGLAS E, SHAH KARTIK
Year of Publication 24.05.2018
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Year of Publication 24.05.2018
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 28.03.2023
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Year of Publication 28.03.2023
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 22.02.2023
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Year of Publication 22.02.2023
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 05.10.2022
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Year of Publication 05.10.2022
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APPARATUS FOR ADJUSTABLE LIGHT SOURCE
GIRIDHAR, Kamesh, KUMAR, Navjot, CHU, Schubert S, GAJENDRA, Palamurali, MYO, Nyi O
Year of Publication 28.09.2017
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Year of Publication 28.09.2017
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APPARATUS FOR ADJUSTABLE LIGHT SOURCE
GIRIDHAR, Kamesh, KUMAR, Navjot, CHU, Schubert S, GAJENDRA, Palamurali, MYO, Nyi O
Year of Publication 25.08.2016
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Year of Publication 25.08.2016
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 12.06.2019
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Year of Publication 12.06.2019
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APPARATUS FOR ADJUSTABLE LIGHT SOURCE
CHU SCHUBERT S, GIRIDHAR KAMESH, MYO NYI O, KUMAR NAVJOT, GAJENDRA PALAMURALI
Year of Publication 21.04.2016
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Year of Publication 21.04.2016
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NEW SUSCEPTOR DESIGN TO ELIMINATE DEPOSITION VALLEYS IN THE WAFER
GAJENDRA, PALAMURALI, CHU, SCHUBERT S, SANCHEZ, ERROL ANTONIO C, TOBIN, JEFFREY, SHAH, KARTIK, MYO, NYI O, RAMANATHAN, KARTHIK
Year of Publication 28.07.2016
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Year of Publication 28.07.2016
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SUSCEPTOR DESIGN TO ELIMINATE DEPOSITION VALLEYS IN THE WAFER
SANCHEZ Errol Antonio C, CHU Schubert S, TOBIN Jeffrey, SHAH Kartik, GAJENDRA Palamurali, MYO Nyi O, RAMANATHAN Karthik
Year of Publication 28.07.2016
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Year of Publication 28.07.2016
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 15.08.2018
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Year of Publication 15.08.2018
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
SANCHEZ Errol Antonio C, RAO Preetham, CHU Schubert S, HOLMGREN Douglas E, SHAH Kartik, BAUTISTA Kevin Joseph, YE Zhiyuan, COLLINS Richard O, GAJENDRA Palamurali, HILKENE Martin A, MYO Nyi O
Year of Publication 13.04.2017
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Year of Publication 13.04.2017
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 13.04.2017
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Year of Publication 13.04.2017
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Apparatus for adjustable light source
CHU SCHUBERT S, GIRIDHAR KAMESH, MYO NYI O, KUMAR NAVJOT, GAJENDRA PALAMURALI
Year of Publication 26.09.2017
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Year of Publication 26.09.2017
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Diode laser for wafer heating for EPI processes
HILKENE, MARTIN A, GAJENDRA, PALAMURALI, BAUTISTA, KEVIN JOSEPH, CHU, SCHUBERT S, SANCHEZ, ERROL ANTONIO C, HOLMGREN, DOUGLAS E, COLLINS, RICHARD O, SHAH, KARTIK, MYO, NYI O, RAO, PREETHAM, YE, ZHI-YUAN
Year of Publication 01.08.2020
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Year of Publication 01.08.2020
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Diode laser for wafer heating for epi processes
HILKENE, MARTIN A, GAJENDRA, PALAMURALI, BAUTISTA, KEVIN JOSEPH, CHU, SCHUBERT S, SANCHEZ, ERROL ANTONIO C, HOLMGREN, DOUGLAS E, YE, ZHIYUAN, COLLINS, RICHARD O, SHAH, KARTIK, MYO, NYI O, RAO, PREETHAM
Year of Publication 21.04.2020
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Year of Publication 21.04.2020
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NEW SUSCEPTOR DESIGN TO ELIMINATE DEPOSITION VALLEYS IN THE WAFER
CHU SCHUBERT S, RAMANATHAN KARTHIK, MYO NYI O, TOBIN JEFFREY, GAJENDRA PALAMURALI, SANCHEZ ERROL ANTONIO C, SHAH KARTIK
Year of Publication 29.08.2017
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Year of Publication 29.08.2017
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