DEVICE FOR HANDLING WAFER-SHAPED OBJECTS IN A HANDLING PLANE OF A LOCAL CLEAN ROOM
SCHULTZ, KLAUS, HEITMANN, MICHAEL, GAGLIN, AXEL, SCHELER, WERNER, LAHNE, BERNDT
Year of Publication 01.12.1998
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Year of Publication 01.12.1998
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EINRICHTUNG ZUM HANDELN VON SCHEIBENFÖRMIGEN OBJEKTEN IN EINER HANDLINGEBENE EINES LOKALEN REINRAUMES
SCHULTZ, KLAUS, HEITMANN, MICHAEL, GAGLIN, AXEL, SCHELER, WERNER, LAHNE, BERNDT
Year of Publication 15.06.1998
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Year of Publication 15.06.1998
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DEVICE FOR HANDLING WAFER-SHAPED OBJECTS IN A HANDLING PLANE OF A LOCAL CLEAN ROOM
SCHULTZ, KLAUS, HEITMANN, MICHAEL, GAGLIN, AXEL, SCHELER, WERNER, LAHNE, BERNDT
Year of Publication 03.06.1998
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Year of Publication 03.06.1998
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Device for handling disk-shaped objects in a handling plane of a local clean room
GAGLIN; AXEL, SCHULTZ; KLAUS, HEITMANN; MICHAEL, SCHELER; WERNER, LAHNE; BERNDT
Year of Publication 01.07.1997
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Year of Publication 01.07.1997
Patent
DEVICE FOR HANDLING WAFER-SHAPED OBJECTS IN A HANDLING PLANE OF A LOCAL CLEAN ROOM
SCHULTZ, KLAUS, HEITMANN, MICHAEL, GAGLIN, AXEL, SCHELER, WERNER, LAHNE, BERNDT
Year of Publication 15.03.1995
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Year of Publication 15.03.1995
Patent
DEVICE FOR HANDLING WAFER-SHAPED OBJECTS IN A HANDLING PLANE OF A LOCAL CLEAN ROOM
SCHULTZ, KLAUS, HEITMANN, MICHAEL, GAGLIN, AXEL, SCHELER, WERNER, LAHNE, BERNDT
Year of Publication 13.10.1994
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Year of Publication 13.10.1994
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Einrichtung zur Handhabung von scheibenförmigen Objekten in einer Handhabungsebene eines lokalen Reinraumes
SCHULTZ, KLAUS, 07745 JENA, DE, LAHNE, BERNDT, 07747 JENA, DE, HEITMANN, MICHAEL, 07747 JENA, DE, GAGLIN, AXEL, 07747 JENA, DE, SCHELER, WERNER, 07743 JENA, DE
Year of Publication 02.05.1996
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Year of Publication 02.05.1996
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Einrichtung zum Handeln von scheibenförmigen Objekten in einer Handlingebene eines lokalen Reinraumes
SCHULTZ, KLAUS, O-6908 JENA, DE, GAGLIN, AXEL, O-6902 JENA, DE, HEITMANN, MICHAEL, O-6902 JENA, DE, SCHELER, WERNER, O-6900 JENA, DE, LAHNE, BERNDT, O-6902 JENA, DE
Year of Publication 06.10.1994
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Year of Publication 06.10.1994
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