EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
BUSCHE MATTHEW, STEVENOT SCOTT, GAFF KEITH WILLIAM, RICCI ANTHONY, POVOLNY HENRY S
Year of Publication 11.06.2024
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Year of Publication 11.06.2024
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EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
BUSCHE MATTHEW, STEVENOT SCOTT, GAFF KEITH WILLIAM, RICCI ANTHONY, POVOLNY HENRY S
Year of Publication 15.09.2022
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Year of Publication 15.09.2022
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EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
BUSCHE MATTHEW, STEVENOT SCOTT, GAFF KEITH WILLIAM, RICCI ANTHONY, POVOLNY HENRY S
Year of Publication 03.03.2022
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Year of Publication 03.03.2022
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POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
ANDERSON TOM, LU RALPH JAN PIN, ROBERTSON PAUL, GAFF KEITH WILLIAM, PAPE ERIC A, BENJAMIN NEIL, COMENDANT KEITH
Year of Publication 03.02.2021
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Year of Publication 03.02.2021
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EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
BUSCHE MATTHEW, STEVENOT SCOTT, GAFF KEITH WILLIAM, RICCI ANTHONY, POVOLNY HENRY S
Year of Publication 06.07.2015
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Year of Publication 06.07.2015
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LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
HA HANH TUONG, RICHARDSON BRETT C, AUGUSTINO JASON, CHAU QUAN, SINGH HARMEET, GAFF KEITH WILLIAM
Year of Publication 03.06.2016
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Year of Publication 03.06.2016
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LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
HA HANH TUONG, RICHARDSON BRETT C, AUGUSTINO JASON, CHAU QUAN, SINGH HARMEET, GAFF KEITH WILLIAM
Year of Publication 04.09.2015
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Year of Publication 04.09.2015
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EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
LEE SUNG, CHHATRE AMBARISH, LAI BROOKE MESLER, GAFF KEITH WILLIAM, SCHAEFER DAVID
Year of Publication 02.07.2014
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Year of Publication 02.07.2014
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POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
ANDERSON TOM, LU RALPH JAN PIN, ROBERTSON PAUL, GAFF KEITH WILLIAM, PAPE ERIC A, BENJAMIN NEIL, COMENDANT KEITH
Year of Publication 10.06.2014
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Year of Publication 10.06.2014
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LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
HA HANH TUONG, RICHARDSON BRETT C, AUGUSTINO JASON, CHAU QUAN, SINGH HARMEET, GAFF KEITH WILLIAM
Year of Publication 13.07.2011
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Year of Publication 13.07.2011
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EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
SCHAEFER, David, Chhatre, Ambarish, Gaff, Keith William, Kim, Sung Je, Lai, Brooke Mesler
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
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Edge seal for lower electrode assembly
Chhatre, Ambarish, Gaff, Keith William, Kim, Sung Je, Lai, Brooke Mesler, Schaefer, David
Year of Publication 10.10.2023
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Year of Publication 10.10.2023
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