ECR multi-charged ion source directly excited in a circular TE01 mode cavity resonator
Kato, Yushi, Furuki, Hideyuki, Asaji, Toyohisa, Sasaki, Hiroshi, Ishii, Sigeyuki
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2005)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2005)
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Journal Article
An ECR ion source directly excited in a selected microwave mode cavity resonator for material processing
Asaji, Toyohisa, Sasaki, Hiroshi, Furuki, Hideyuki, Kato, Yushi, Ishii, Shigeyuki, Kanazawa, Motoichi, Saito, Junji
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2005)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2005)
Get full text
Journal Article