Low thermal budget antimony/phosphorus NMOS technology for CMOS
Harame, D.L., Ganin, E., Comfort, J.H., Sun, J.Y.-C., Acovic, A., Cohen, S.A., Ronsheim, P.A., Verdonckt-Vandebroek, S., Restle, P.J., Ratanaphanyarat, S., Saccamango, M.J., Johnson, J.B., Furkay, S.A.
Published in International Electron Devices Meeting 1991 [Technical Digest] (1991)
Published in International Electron Devices Meeting 1991 [Technical Digest] (1991)
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