Search Results - "Fumitoshi Sugimoto, Fumitoshi Sugimoto" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Adsorption behavior of organic contaminants on a silicon wafer surface

Adsorption behavior of organic contaminants on a silicon wafer surface

by SUGIMOTO, Fumitoshi, OKAMURA, Sigeru
Published in Journal of the Electrochemical Society (01.07.1999)

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Journal Article

Bond strength of bonded SOI wafers

Bond strength of bonded SOI wafers

by SUGIMOTO, F, ARIMOTO, Y
Published in Japanese Journal of Applied Physics (01.04.1992)

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Journal Article

Pulse-Field-Assisted Wafer Bonding for Silicon on Insulator

Pulse-Field-Assisted Wafer Bonding for Silicon on Insulator

by Yoshihiro Arimoto, Yoshihiro Arimoto, Fumitoshi Sugimoto, Fumitoshi Sugimoto
Published in Japanese Journal of Applied Physics (01.06.1992)

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Journal Article

Influence of Organic Contamination on Silicon Dioxide Integrity

Influence of Organic Contamination on Silicon Dioxide Integrity

by Sugimoto, Fumitoshi, Okamura, Sigeru, Inokuma, Takao, Kurata, Yoshihiro, Hasegawa, Seiichi
Published in Japanese Journal of Applied Physics (01.05.2000)

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Journal Article

Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box

Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box

by Habuka, Hitoshi, Shimazaki, Yohei, Okamura, Shigeru, Sugimoto, Fumitoshi, Takeuchi, Takashi, Aihara, Masahiko, Shimada, Manabu, Okuyama, Kikuo
Published in Japanese Journal of Applied Physics (2003)

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Journal Article

Simultaneous temperature measurement of wafers in chemical mechanical polishing of silicon dioxide layer

Simultaneous temperature measurement of wafers in chemical mechanical polishing of silicon dioxide layer

by SUGIMOTO, F, ARIMOTO, Y, ITO, T
Published in Japanese Journal of Applied Physics (1995)

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Journal Article

A pH-controlled chemical mechanical polishing method for thin bonded silicon-on-insulator wafers

A pH-controlled chemical mechanical polishing method for thin bonded silicon-on-insulator wafers

by SUGIMOTO, F, HORIE, H, ARIMOTO, Y, ITO, T
Published in Japanese Journal of Applied Physics (1995)

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Journal Article

Capacitor array, AD converter and semiconductor device

Capacitor array, AD converter and semiconductor device

by SUGIMOTO FUMITOSHI, ARUGA KENTA
Year of Publication 29.09.2015

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Patent

CAPACITOR ARRAY, AD CONVERTER AND SEMICONDUCTOR DEVICE

CAPACITOR ARRAY, AD CONVERTER AND SEMICONDUCTOR DEVICE

by SUGIMOTO FUMITOSHI, ARUGA KENTA
Year of Publication 20.08.2015

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Patent

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

by SUGIMOTO FUMITOSHI
Year of Publication 14.04.2011

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Patent

Exposure mask, its manufacture method, pattern transfer method, pattern forming method, and SRAM manufacture method

Exposure mask, its manufacture method, pattern transfer method, pattern forming method, and SRAM manufacture method

by SUGIMOTO FUMITOSHI
Year of Publication 15.02.2011

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Patent

Exposure mask, its manufacture method, pattern transfer method, pattern forming method, and SRAM manufacture method

Exposure mask, its manufacture method, pattern transfer method, pattern forming method, and SRAM manufacture method

by Sugimoto, Fumitoshi
Year of Publication 15.02.2011

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Patent

Semiconductor device manufacturing method, mask manufacturing method, and exposure method

Semiconductor device manufacturing method, mask manufacturing method, and exposure method

by SUGIMOTO FUMITOSHI
Year of Publication 26.10.2010

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Patent

Semiconductor device manufacturing method, mask manufacturing method, and exposure method

Semiconductor device manufacturing method, mask manufacturing method, and exposure method

by Sugimoto, Fumitoshi
Year of Publication 26.10.2010

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Patent

Method for fabricating semiconductor device and exposure mask

Method for fabricating semiconductor device and exposure mask

by Sugimoto, Fumitoshi
Year of Publication 22.06.2010

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Patent

Method for fabricating semiconductor device and exposure mask

Method for fabricating semiconductor device and exposure mask

by SUGIMOTO FUMITOSHI
Year of Publication 22.06.2010

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Patent

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

by SUGIMOTO FUMITOSHI
Year of Publication 25.02.2010

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Patent

PHOTOMASK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PHOTOMASK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by SUGIMOTO FUMITOSHI
Year of Publication 05.02.2009

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Patent

Exposure mask, its manufacture method, pattern transfer method, pattern forming method, and SRAM manufacture method

Exposure mask, its manufacture method, pattern transfer method, pattern forming method, and SRAM manufacture method

by SUGIMOTO FUMITOSHI
Year of Publication 12.06.2008

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Patent

EXPOSURE MASK, METHOD FOR PRODUCING SAME, AND METHOD FOR TRANSFERRING PATTERN

EXPOSURE MASK, METHOD FOR PRODUCING SAME, AND METHOD FOR TRANSFERRING PATTERN

by SUGIMOTO FUMITOSHI
Year of Publication 10.03.2008

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Patent