Investigation of d.c.-reactive magnetron-sputtered AlN thin films by electron microprobe analysis, X-ray photoelectron spectroscopy and polarised infra-red reflection
Manova, D., Dimitrova, V., Fukarek, W., Karpuzov, D.
Published in Surface & coatings technology (04.08.1998)
Published in Surface & coatings technology (04.08.1998)
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Journal Article
Anisotropic deformation of colloidal particles under MeV ion irradiation
van Dillen, T, Snoeks, E, Fukarek, W, van Kats, C.M, Velikov, K.P, van Blaaderen, A, Polman, A
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2001)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2001)
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Journal Article
Ion flux, ion energy distribution and neutral density in an inductively coupled argon discharge
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Journal Article
Conference Proceeding
Electrical and optical properties of boronated tetrahedrally bonded amorphous carbon (ta-C:B)
Kleinsorge, B., Ilie, A., Chhowalla, M., Fukarek, W., Milne, W.I., Robertson, J.
Published in Diamond and related materials (01.02.1998)
Published in Diamond and related materials (01.02.1998)
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Journal Article
Effects of titanium and aluminum incorporations on the structure of boron nitride thin films
Kolitsch, A, Wang, X, Manova, D, Fukarek, W, Möller, W, Oswald, S
Published in Diamond and related materials (01.03.1999)
Published in Diamond and related materials (01.03.1999)
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Journal Article
Hydrogen and disorder in diamond-like carbon
Kleinsorge, B., Rodil, S.E., Adamopoulos, G., Robertson, J., Grambole, D., Fukarek, W.
Published in Diamond and related materials (01.03.2001)
Published in Diamond and related materials (01.03.2001)
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Journal Article
Conference Proceeding
Composite germanium/C:H films prepared by DC unbalanced magnetron sputtering
BIEDERMAN, H, STUNDZIA, V, SLAVINSKA, D, ZALMAN, J, PESICKA, J, VANECEK, M, ZEMEK, J, FUKAREK, W
Published in Thin solid films (01.08.1999)
Published in Thin solid films (01.08.1999)
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Conference Proceeding
Journal Article
Ion Energy Distribution in a Radiofrequency C4F8
Chevolleau, T., Fukarek, W., Möller, W.
Published in Contributions to plasma physics (1988) (01.07.2001)
Published in Contributions to plasma physics (1988) (01.07.2001)
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