Stress engineering and mechanical properties of SU-8-layers for mechanical applications
Hammacher, J., Fuelle, A., Flaemig, J., Saupe, J., Loechel, B., Grimm, J.
Published in Microsystem technologies (01.10.2008)
Published in Microsystem technologies (01.10.2008)
Get full text
Journal Article
Conference Proceeding
Growth studies of Ta-based films on Si with STM and XPS
Zahn, W., Oswald, S., Fülle, A., Hildebrand, D., Zier, M., Wetzig, K.
Published in Physica status solidi. C (01.05.2007)
Published in Physica status solidi. C (01.05.2007)
Get full text
Journal Article
Photovoltaic module
STECKEMETZ, STEFAN, FUELLE, ALEXANDER, KOCH, CHRISTIAN, BAMBERG, FREDERICK, WALTHER, JOERG, KUTZER, MARTIN
Year of Publication 16.03.2015
Get full text
Year of Publication 16.03.2015
Patent