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Published in ACS applied materials & interfaces (26.12.2012)
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Year of Publication 15.12.2015
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SURFACE PLASMA MODIFICATION OF POROUS THIN-FILMS TO OPTIMIZE PORE FILLING
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Year of Publication 16.06.2015
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Year of Publication 06.01.2015
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IN-SITU HARDMASK GENERATION
DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P
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Year of Publication 18.12.2014
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Reduction of pore fill material dewetting
DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P
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Year of Publication 28.10.2014
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Homogeneous porous low dielectric constant materials
DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P, PURUSHOTHAMAN SAMPATH
Year of Publication 07.01.2014
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Year of Publication 07.01.2014
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Reduction of pore fill material dewetting
DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P
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Year of Publication 24.09.2013
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REDUCTION OF PORE FILL MATERIAL DEWETTING
DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P
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Year of Publication 21.02.2013
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Overburden Removal For Pore Fill Integration Approach
BRUCE ROBERT L, DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J
Year of Publication 17.01.2013
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Year of Publication 17.01.2013
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Reduction Of Pore Fill Material Dewetting
DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P
Year of Publication 17.01.2013
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Year of Publication 17.01.2013
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Homogeneous porous low dielectric constant materials
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Year of Publication 20.11.2012
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Year of Publication 20.11.2012
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Homogeneous porous low dielectric constant materials
DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P, PURUSHOTHAMAN SAMPATH
Year of Publication 20.11.2012
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Year of Publication 20.11.2012
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HOMOGENEOUS POROUS LOW DIELECTRIC CONSTANT MATERIALS
DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P, PURUSHOTHAMAN SAMPATH
Year of Publication 08.11.2012
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Year of Publication 08.11.2012
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Homogeneous porous low dielectric constant materials
BRUCE ROBERT L, RATH DAVID L, DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P, PURUSHOTHAMAN SAMPATH
Year of Publication 23.07.2013
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Year of Publication 23.07.2013
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HOMOGENEOUS POROUS LOW DIELECTRIC CONSTANT MATERIALS
BRUCE ROBERT L, RATH DAVID L, DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, FROT THEO J, MAGBITANG TEDDIE P, PURUSHOTHAMAN SAMPATH
Year of Publication 27.12.2012
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Year of Publication 27.12.2012
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