Ultrathin TaN Damascene Nanowire Structures on 300-mm Si Wafers for Quantum Applications
Bhatia, Ekta, Lombardi, Jack, Kar, Soumen, Senatore, Michael, Olson, Stephen, Vo, Tuan, Schujman, Sandra, Nalaskowski, Jakub, Frost, Hunter, Mucci, John, Martinick, Brian, Hung, Pui Yee, Wells, Ilyssa, Murray, Thomas, Johnson, Corbet S., Biedron, Aleksandra, Kaushik, Vidya, Campbell, Dan, Lahaye, Matthew D., Rao, Satyavolu S. Papa
Published in IEEE transactions on quantum engineering (2023)
Published in IEEE transactions on quantum engineering (2023)
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Journal Article
Transport Properties of NbN-Cu Bilayer Superconducting Nanowires
Shah, Archit, Kar, Soumen, Tillman, Chase C., Bankson, Stephen, Frost, Hunter, Bhatia, Ekta, Olson, Stephen, Mucci, John, Nalaskowski, Jakub, Martinick, Brian, Schujman, Sandra, Murray, Thomas, Johnson, Corbet S., Wells, Ilyssa, Rao, Satyavolu S. Papa, Sellers, John A., Hamilton, Michael C.
Published in IEEE transactions on applied superconductivity (01.05.2024)
Published in IEEE transactions on applied superconductivity (01.05.2024)
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Journal Article
Copper Encapsulated Ultra-Thin NbN Films and Damascene Structures on 300 mm Si Wafers
Kar, Soumen, Walker, Harrison, Shah, Archit, Frost, Hunter, Olson, Stephen, Mucci, John, Nalaskowski, Jakub, Martinick, Brian, Schujman, Sandra, Murray, Thomas, Johnson, Corbet S., Wells, Ilyssa, Bourque, Ronald, Pierce, Stanley, Bhatia, Ekta, Hamilton, Michael C., Rao, Satyavolu S. Papa
Published in IEEE transactions on applied superconductivity (01.08.2023)
Published in IEEE transactions on applied superconductivity (01.08.2023)
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Journal Article
Enabling 300 mm Wafer-Scale Fabrication of Superconducting Quantum Devices
Bhatia, Ekta, Frost, Hunter, Pieniazek, Nicholas, Nalaskowski, Jakub, Mucci, John, Collison, Wenli, Martinick, Brian, Telhu, Geevanie, Egan, Bryan, Olson, Stephen, Hung, Pui-Yee, Wells, Ilyssa, Johnson, Corbet, Murray, Thomas, Musick, Kevin, Rao, Satyavolu Papa
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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Conference Proceeding
Chemical Mechanical Planarization for Ta-based Superconducting Quantum Devices
Bhatia, Ekta, Kar, Soumen, Nalaskowski, Jakub, Vo, Tuan, Olson, Stephen, Frost, Hunter, Mucci, John, Martinick, Brian, Hung, Pui Yee, Wells, Ilyssa, Schujman, Sandra, Papa Rao, Satyavolu S
Published in arXiv.org (16.02.2023)
Published in arXiv.org (16.02.2023)
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Paper
Journal Article
Plasma-induced roughness and chemical modifications of TiN bottom electrode and their impact on HfO2-MIM properties
Rogalskyj, Sophia, Frost, Hunter, Palka, Amber, Joy, Nicholas, Triyoso, Dina, Clark, Robert, Wajda, Cory, Leusink, Gert, Raley, Angelique, Dunn, Kathleen
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
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Conference Proceeding
Engineering of Niobium Surfaces Through Accelerated Neutral Atom Beam Technology For Quantum Applications
Kar, Soumen, Weiland, Conan, Zhou, Chenyu, Bhatia, Ekta, Martinick, Brian, Nalaskowski, Jakub, Mucci, John, Olson, Stephen, Hung, Pui Yee, Wells, Ilyssa, Frost, Hunter, Johnson, Corbet S, Murray, Thomas, Kaushik, Vidya, Kirkpatrick, Sean, Chau, Kiet, Walsh, Michael J, Liu, Mingzhao, Papa Rao, Satyavolu S
Published in arXiv.org (27.02.2023)
Published in arXiv.org (27.02.2023)
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Paper
Journal Article
Fabrication process validation and investigations of lithium-ionic conductors for all-solid Li-ion batteries
Flottman, Spencer, Frost, Hunter J., Altwerger, Mark, Higashiya, Seiichiro, Sadana, Devendra K., Efstathiadis, Harry
Published in 2018 IEEE Nanotechnology Symposium (ANTS) (01.11.2018)
Published in 2018 IEEE Nanotechnology Symposium (ANTS) (01.11.2018)
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Conference Proceeding