Chemical/mechanical balance management through pad microstructure in CMP
Yim, R., Perrot, C., Balan, V., Friot, P.-Y., Qian, B., Chiou, N., Jacob, G., Gourvest, E., Salvatore, F., Valette, S.
Published in Microelectronic engineering (05.08.2018)
Published in Microelectronic engineering (05.08.2018)
Get full text
Journal Article
Evidence of bcc Mn epitaxial growth in Mn/MxV1-x(001) (M = Fe, Nb) superlattices
FRIOT, P. Y, TURBAN, P, ANDRIEU, S, PIECUCH, M, SNOECK, E, TRAVERSE, A, FOY, E, THEODORESCU, C
Published in The European physical journal. B, Condensed matter physics (01.05.2000)
Published in The European physical journal. B, Condensed matter physics (01.05.2000)
Get full text
Journal Article