Semiconductor device and method of manufacture
Freeman, Jr, John L, Balda, Raymond J, Pryor, Robert A, Petrucci, Jr, Joseph L, Johnsen, Robert J
Year of Publication 31.05.2005
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Year of Publication 31.05.2005
Patent
Method of manufacturing a semiconductor component
Freeman, Jr., John L, Balda, Raymond J, Pryor, Robert A, Paulsen, James D, Johnsen, Robert J
Year of Publication 03.12.2002
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Year of Publication 03.12.2002
Patent
INTRODUCTION
Tracy, Clarence J, Freeman Jr., John L, Wilson, Syd R
Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Contributors
Tracy, Clarence J, Freeman Jr., John L, Wilson, Syd R
Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
Book Chapter
Intro
Tracy, Clarence J, Freeman Jr., John L, Wilson, Syd R
Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
Book Chapter
Planarization Techniques
Tracy, Clarence J, Wilson, Syd R, Freeman Jr., John L
Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Silicides and Contacts for ULSI
Tracy, Clarence J, Wilson, Syd R, Freeman Jr., John L
Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Manufacturing and Analytic Methods
Tracy, Clarence J, Wilson, Syd R, Freeman Jr., John L
Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Future Interconnect Systems
Tracy, Clarence J, Wilson, Syd R, Freeman Jr., John L
Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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Published in Handbook of Multilevel Metallization for Integrated Circuits (1993)
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