NOVEL CHEMICALLY AMPLIFIED DRY-DEVELOPING IMAGING MATERIALS FOR HIGH RESOLUTION MICROLITHOGRAPHY
Frchet, J.M.J., Fahey, J., Lee, S. M., Matuszczak, S., Shacham-Diamand, Y., MacDonald, S.A., Willson, C.G.
Published in Journal of Photopolymer Science and Technology (1992)
Published in Journal of Photopolymer Science and Technology (1992)
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