Yaw rate sensor
GOMEZ UDO-MARTIN, NEUL REINHARD, QUANDER MARCO, HAUER JOERG, CLASSEN JOHANNES, FRANKE AXEL, KEHR KERSTEN
Year of Publication 16.02.2016
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Year of Publication 16.02.2016
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Verfahren zur Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors
Franke, Axel, Rank, Holger, Keck, Marian, Kaelberer, Arnd, Classen, Johannes, Buhmann, Alexander, Sattler, Robert, Faisst, Hans-Joerg, Hattass, Mirko, Maas, Ramona
Year of Publication 05.01.2023
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Year of Publication 05.01.2023
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MICROELECTROMECHANICAL SENSOR MODULE AND CORRESPONDING PRODUCTION METHOD
FRANKE, AXEL, WAGNER, THOMAS, BISCHOPINK, GEORG, PIRK, TJALF, FEYH, ANDO
Year of Publication 16.10.2013
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Year of Publication 16.10.2013
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Multiaxial micromechanical acceleration sensor
CLASSEN JOHANNES, REICHENBACH RALF, FRANKE AXEL, SCHUBERT DIETRICH, KEHR KERSTEN
Year of Publication 30.04.2013
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Year of Publication 30.04.2013
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