Anisotropic Etching of Submicronic Resist Structures by Resonant Inductive Plasma Etching
Etrillard, Jackie, Francou, Jean-Marc, Inard, Alain, Henry, Daniel
Published in Japanese Journal of Applied Physics (01.10.1994)
Published in Japanese Journal of Applied Physics (01.10.1994)
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Journal Article
Temperature effects in a RIPE reactor
Petri, Richard, Francou, Jean-Marc, Inard, Alain, Henry, Daniel
Published in Microelectronic engineering (01.03.1991)
Published in Microelectronic engineering (01.03.1991)
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Journal Article
Trench process with HBr chemistry in ripe
Francou, Jean-Marc, Inard, Alain, Henry, Daniel
Published in Microelectronic engineering (01.01.1991)
Published in Microelectronic engineering (01.01.1991)
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Journal Article
Photoresist spin coating mechanism related to polymer solution rheology
Weill, Andre, Francou, Jean Marc, Dechenaux, Elisabeth
Published in Microelectronic engineering (1987)
Published in Microelectronic engineering (1987)
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Journal Article