다수의 금속 하우징들을 갖는 모듈식 마이크로파 소스
CARDUCCI JAMES, FOVELL RICHARD, GANTA SATHYA SWAROOP, RODRIGUES SILVERST, KRAUS PHILIP ALLAN, BALARAMAN KARTHIKEYAN, MOORE ROBERT
Year of Publication 09.02.2023
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Year of Publication 09.02.2023
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통합 온도 제어를 이용하는 모놀리식 모듈러 마이크로파 소스
CARDUCCI JAMES, RODRIGUES SILVERST, CHUA THAI CHENG, KRAUS PHILIP ALLAN, FOVELL RICHARD C, ELIZAGA LARRY D
Year of Publication 24.05.2022
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Year of Publication 24.05.2022
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통합 프로세스 가스 분배를 이용하는 모놀리식 모듈러 마이크로파 소스
CARDUCCI JAMES, RODRIGUES SILVERST, CHUA THAI CHENG, KRAUS PHILIP ALLAN, KNYAZIK VLADIMIR, FOVELL RICHARD C, ELIZAGA LARRY D
Year of Publication 19.05.2022
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Year of Publication 19.05.2022
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고 전력 플라즈마 에칭 프로세스들을 위한 가스 분배 플레이트 조립체
CARDUCCI JAMES D, PARKHE VIJAY D, RAMASWAMY KARTIK, RICE MICHAEL R, COLLINS KENNETH S, FOVELL RICHARD CHARLES
Year of Publication 08.01.2019
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Year of Publication 08.01.2019
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METHOD AND APPARATUS FOR GAS FLOW MEASUREMENT
GOLD EZRA ROBERT, CRUSE JAMES PATRICK, LEE JARED AHMAD, FOVELL RICHARD CHARLES, ZHANG CHUNLEI
Year of Publication 09.09.2013
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Year of Publication 09.09.2013
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FAST SUBSTRATE SUPPORT TEMPERATURE
FOVELL RICHARD, KHAN ANISUL H, BRILLHART PAUL, NEVIL SHANE, YI SANG IN, DINEV JIVKO
Year of Publication 04.04.2014
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Year of Publication 04.04.2014
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METHODS AND APPARATUS FOR RAPIDLY RESPONSIVE HEAT CONTROL IN PLASMA PROCESSING DEVICES
AKRISHNA AJIT, FOVELL RICHARD, CRUSE JAMES P, GOLD EZRA ROBERT, ZHANG CHUNLEI
Year of Publication 28.06.2011
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Year of Publication 28.06.2011
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METHOD AND APPARATUS FOR CONTROLLING TEMPERATURE OF A SUBSTRATE
BRILLHART PAUL L, ZHOU XIAOPING, TAVASSOLI HAMID, BUCHBERGER JR. DOUGLAS A, FOVELL RICHARD CHARLES
Year of Publication 27.09.2010
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Year of Publication 27.09.2010
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METHOD AND APPARATUS FOR GAS FLOW MEASUREMENT
GOLD EZRA ROBERT, CRUSE JAMES PATRICK, LEE JARED AHMAD, FOVELL RICHARD CHARLES, ZHANG CHUNLEI
Year of Publication 19.08.2010
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Year of Publication 19.08.2010
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MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS
MOORE, Robert, FOVELL, Richard, CARDUCCI, James, BALARAMAN, Karthikeyan, RODRIGUES, Silverst, KRAUS, Philip, Allan, GANTA, Sathya, Swaroop
Year of Publication 17.07.2024
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Year of Publication 17.07.2024
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Modular microwave source with multiple metal housings
Balaraman, Karthikeyan, Fovell, Richard, Kraus, Philip Allan, Rodrigues, Silverst, Ganta, Sathya Swaroop, Moore, Robert, Carducci, James
Year of Publication 09.07.2024
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Year of Publication 09.07.2024
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FAST SUBSTRATE SUPPORT TEMPERATURE CONTROL
FOVELL RICHARD, KHAN ANISUL H, BRILLHART PAUL, NEVIL SHANE, YI SANG IN, DINEV JIVKO
Year of Publication 04.03.2011
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Year of Publication 04.03.2011
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MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CONTROL
FOVELL, Richard, C, CARDUCCI, James, CHUA, Thai, Cheng, RODRIGUES, Silverst, KRAUS, Philip, Allan, ELIZAGA, Larry, D
Year of Publication 01.11.2023
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Year of Publication 01.11.2023
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