Improvement in the degradation resistance of silicon nanostructures by the deposition of diamond-like carbon films
Klyui, N. I., Semenenko, M. A., Khatsevich, I. M., Makarov, A. V., Kabaldin, A. N., Fomovskii, F. V., Han, Wei
Published in Semiconductors (Woodbury, N.Y.) (01.08.2015)
Published in Semiconductors (Woodbury, N.Y.) (01.08.2015)
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