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Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition
by
Elliott, Simon D.
,
Dey, Gangotri
,
Maimaiti, Yasheng
,
Ablat, Hayrensa
,
Filatova, Ekaterina A.
,
Fomengia
,
Glen N
.
Published in
Advanced materials (Weinheim)
(01.07.2016)
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First principles mechanistic study of self-limiting oxidative adsorption of remote oxygen plasma during the atomic layer deposition of alumina
by
Fomengia
,
Glen N
,
Nolan, Michael
,
Elliott, Simon D
Published in
Physical chemistry chemical physics : PCCP
(2018)
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First principles mechanistic study of self-limiting oxidative adsorption of remote oxygen plasma during the atomic layer deposition of aluminaElectronic supplementary information (ESI) available. See DOI: 10.1039/c8cp03495h
by
Fomengia
,
Glen N
,
Nolan, Michael
,
Elliott, Simon D
Year of Publication
12.09.2018
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