Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure
Gui, Chengqun, Legtenberg, R, Elwenspoek, M, Fluitman, J H
Published in Journal of micromechanics and microengineering (01.06.1995)
Published in Journal of micromechanics and microengineering (01.06.1995)
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Journal Article
Conference Proceeding
Towards integrated microliquid handling systems
Elwenspoek, M, Lammerink, T S J, Miyake, R, Fluitman, J H J
Published in Journal of micromechanics and microengineering (01.12.1994)
Published in Journal of micromechanics and microengineering (01.12.1994)
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Journal Article
Nonlinearity and hysteresis of resonant strain gauges
Chengqun Gui, Legtenberg, R., Tilmans, H.A.C., Fluitman, J.H.J., Elwenspoek, M.
Published in Journal of microelectromechanical systems (01.03.1998)
Published in Journal of microelectromechanical systems (01.03.1998)
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Journal Article
Sacrificial wafer bonding for planarization after very deep etching
Spiering, V.L., Berenschot, J.W., Elwenspoek, M., Fluitman, J.H.J.
Published in Journal of microelectromechanical systems (01.09.1995)
Published in Journal of microelectromechanical systems (01.09.1995)
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Journal Article
An integrated optic adiabatic TE/TM mode splitter on silicon
de Ridder, R.M., Sander, A.F.M., Driessen, A., Fluitman, J.H.J.
Published in Journal of lightwave technology (01.11.1993)
Published in Journal of lightwave technology (01.11.1993)
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Journal Article
Selective Mode Excitation And Detection Of Micromachined Resonators
Prak, A., Elwenspoek, M., Fluitman, J.H.J.
Published in Journal of microelectromechanical systems (01.12.1992)
Published in Journal of microelectromechanical systems (01.12.1992)
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Journal Article
A fabrication process for electrostatic microactuators with integrated gear linkages
Legtenberg, R., Berenschot, E., Elwenspoek, M., Fluitman, J.H.
Published in Journal of microelectromechanical systems (01.09.1997)
Published in Journal of microelectromechanical systems (01.09.1997)
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Journal Article
(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators
Tilmans, H.A.C., Legtenberg, R., Schurer, H., Ijntema, D.J., Elwenspoek, M., Fluitman, J.H.J.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.01.1994)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.01.1994)
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Journal Article
Measuring method for optical fibre sensors
Lammerink, T S J, Fluitman, J H J
Published in Journal of physics. E, Scientific instruments (01.12.1984)
Published in Journal of physics. E, Scientific instruments (01.12.1984)
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Journal Article
Multi-parameter detection in fluid flows
van Kuijk, J., Lammerink, T.S.J., de Bree, H.-E., Elwenspoek, M., Fluitman, J.H.J.
Published in Sensors and actuators. A, Physical (1995)
Published in Sensors and actuators. A, Physical (1995)
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Journal Article
Conference Proceeding
Micro mixer with fast diffusion
Miyake, R., Lammerink, T.S.J., Elwenspoek, M., Fluitman, J.H.J.
Published in IEEE, IEEE SERVICE CENTER, PISCATAWAY, NJ (USA). pp. 248-253. 1993 (1993)
Published in IEEE, IEEE SERVICE CENTER, PISCATAWAY, NJ (USA). pp. 248-253. 1993 (1993)
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Conference Proceeding
Journal Article
Fundamental study on a thin-film AE sensor for measurement of behavior of a multi-pad contact slider
Imai, S., Burger, G.-J., Lammerink, T.S.J., Fluitman, J.H.J.
Published in IEEE transactions on magnetics (01.09.1996)
Published in IEEE transactions on magnetics (01.09.1996)
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Journal Article