EXTREME UNIFORMITY HEATED SUBSTRATE SUPPORT ASSEMBLY
LUBOMIRSKY DMITRY, FLOYD KIRBY H, SAMIR MEHMET TUGRUL, WANG JUSTIN, PARKHE VIJAY D, KORA SIDDARAMAIAH ONKARA SWAMY, BENJAMINSON DAVID
Year of Publication 09.12.2022
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Year of Publication 09.12.2022
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극도의 균일성의 가열식 기판 지지 조립체
LUBOMIRSKY DMITRY, FLOYD KIRBY H, SAMIR MEHMET TUGRUL, WANG JUSTIN, PARKHE VIJAY D, KORA SIDDARAMAIAH ONKARA SWAMY, BENJAMINSON DAVID
Year of Publication 07.12.2020
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Year of Publication 07.12.2020
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ROTATABLE SUBSTRATE SUPPORT HAVING RADIO FREQUENCY APPLICATOR
KOBAYASHI SATORU, LUBOMIRSKY DMITRY, FLOYD KIRBY H, PARK SOONAM, KENNEY JASON A, HANAWA HIROJI
Year of Publication 13.02.2018
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Year of Publication 13.02.2018
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ROTATABLE SUBSTRATE SUPPORT HAVING RADIO FREQUENCY APPLICATOR
KOBAYASHI SATORU, LUBOMIRSKY DMITRY, FLOYD KIRBY H, PARK SOONAM, KENNEY JASON A, HANAWA HIROJI
Year of Publication 01.06.2016
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Year of Publication 01.06.2016
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CHAMBER APPARATUS FOR CHEMICAL ETCHING OF DIELECTRIC MATERIALS
LUBOMIRSKY DMITRY, TAN TIEN FAK, FLOYD KIRBY H, NGUYEN SON T, PALAGASHVILI DAVID, TAM ALEXANDER, CHEN SHAOFENG
Year of Publication 06.01.2016
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Year of Publication 06.01.2016
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MODULE FOR OZONE CURE AND POST-CURE MOISTURE TREATMENT
PINSON II JAY D, LUBOMIRSKY DMITRY, FLOYD KIRBY H, VENKATARAMAN SHANKAR, KHAN ADIB
Year of Publication 03.01.2014
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Year of Publication 03.01.2014
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LOADLOCK BATCH OZONE CURE
PINSON II JAY D, LUBOMIRSKY DMITRY, FLOYD KIRBY H, VENKATARAMAN SHANKAR, KHAN ADIB
Year of Publication 06.08.2013
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Year of Publication 06.08.2013
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Chamber apparatus for chemical etching of dielectric materials
Lubomirsky, Dmitry, Nguyen, Son T, Palagashvili, David, Tan, Tien Fak, Tam, Alexander, Floyd, Kirby H, Chen, Shaofeng
Year of Publication 12.04.2022
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Year of Publication 12.04.2022
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EXTREME UNIFORMITY HEATED SUBSTRATE SUPPORT ASSEMBLY
KORA SIDDARAMAIAH, Onkara Swamy, BENJAMINSON, David, SAMIR, Mehmet Tugrul, PARKHE, Vijay D, LUBOMIRSKY, Dmitry, WANG, Justin, FLOYD, Kirby H
Year of Publication 05.12.2019
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Year of Publication 05.12.2019
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EXTREME UNIFORMITY HEATED SUBSTRATE SUPPORT ASSEMBLY
KORA SIDDARAMAIAH, Onkara Swamy, BENJAMINSON, David, SAMIR, Mehmet Tugrul, PARKHE, Vijay D, LUBOMIRSKY, Dmitry, WANG, Justin, FLOYD, Kirby H
Year of Publication 05.12.2019
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Year of Publication 05.12.2019
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Module for ozone cure and post-cure moisture treatment
LUBOMIRSKY DMITRY, FLOYD KIRBY H, VENKATARAMAN SHANKAR, KHAN ADIB, PINSON, II JAY D
Year of Publication 15.03.2016
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Year of Publication 15.03.2016
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Wafer rotation in a semiconductor chamber
Floyd Kirby H, Nguyen Tuan Anh, Rocha-Alvarez Juan Carlos, Du Bois Dale R, Kim Robert, Bansal Amit Kumar, Balasubramanian Ganesh, Sankarakrishnan Ramprakash
Year of Publication 20.03.2018
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Year of Publication 20.03.2018
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