Direct Detection of Anchor Damping in MEMS Tuning Fork Resonators
Rodriguez, Janna, Chandorkar, Saurabh Arun, Glaze, Grant M., Gerrard, Dustin D., Chen, Yunhan, Heinz, David B., Flader, Ian B., Kenny, Thomas W.
Published in Journal of microelectromechanical systems (01.10.2018)
Published in Journal of microelectromechanical systems (01.10.2018)
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Journal Article
Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators
Alter, Anne L., Flader, Ian B., Chen, Yunhan, Ortiz, Lizmarie Comenencia, Shin, Dongsuk D., Kenny, Thomas W.
Published in Journal of microelectromechanical systems (01.12.2020)
Published in Journal of microelectromechanical systems (01.12.2020)
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Journal Article
Nonlinearity of Degenerately Doped Bulk-Mode Silicon MEMS Resonators
Yushi Yang, Ng, Eldwin J., Polunin, Pavel M., Yunhan Chen, Flader, Ian B., Shaw, Steven W., Dykman, Mark I., Kenny, Thomas W.
Published in Journal of microelectromechanical systems (01.10.2016)
Published in Journal of microelectromechanical systems (01.10.2016)
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Journal Article
Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators
Miller, James M. L., Zhu, Haoshen, Sundaram, Subramanian, Vukasin, Gabrielle D., Chen, Yunhan, Flader, Ian B., Shin, Dongsuk D., Kenny, Thomas W.
Published in Journal of microelectromechanical systems (01.10.2020)
Published in Journal of microelectromechanical systems (01.10.2020)
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Journal Article
Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity
Flader, Ian B., Goodson, Kenneth E., Kenny, Thomas W., Chen, Yunhan, Yang, Yushi, Ng, Eldwin J., Shin, Dongsuk D., Heinz, David B., Ortiz, Lizmarie Comenencia, Alter, Anne L., Park, Woosung
Published in Journal of microelectromechanical systems (01.06.2019)
Published in Journal of microelectromechanical systems (01.06.2019)
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Journal Article
Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography
Comenencia Ortiz, Lizmarie, Heinz, David B., Flader, Ian B., Alter, Anne L., Shin, Dongsuk D., Chen, Yunhan, Kenny, Thomas W.
Published in MRS communications (01.06.2018)
Published in MRS communications (01.06.2018)
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Journal Article
High Quality Factor Mode Ordered Dual Foucault Pendulum Gyroscope
Asadian, Mohammad H., Askari, Sina, Flader, Ian B., Chen, Yunhan, Gerrard, Dustin D., Shin, Dongsuk D., Kwon, Hyun-Keun, Kenny, Thomas W., Shkel, Andrei M.
Published in 2018 IEEE SENSORS (01.10.2018)
Published in 2018 IEEE SENSORS (01.10.2018)
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Conference Proceeding
Influence of Clamping Loss and Electrical Damping On Nonlinear Dissipation in Micromechanical Resonators
Miller, James M.L., Alter, Anne L., Bousse, Nicholas E., Chen, Yunhan, Flader, Ian B., Shin, Dongsuk D., Kenny, Thomas W., Shaw, Steven W.
Published in 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (09.01.2022)
Published in 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (09.01.2022)
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Conference Proceeding
Q-factor optimization in disk resonator gyroscopes via geometric parameterization
Gerrard, Dustin D., Ahn, Chae H., Flader, Ian B., Chen, Yunhan, Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
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Conference Proceeding
An Epi-Seal Encapsulated Franklin Oscillator Sustaining More Than 200,000,000 Electric Switching Cycles
Kassie, Danny A., Flader, Ian B., Shmulevich, Shai, Kwon, Hyun-Keun, Kenny, Thomas W., Elata, David
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
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Conference Proceeding
Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators
Yunhan Chen, Ng, Eldwin J., Shin, Dongsuk D., Ahn, Chae H., Yushi Yang, Flader, Ian B., Hong, Vu A., Kenny, Thomas W.
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
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Conference Proceeding
Stochastic method for disk resonating gyroscope mode matching and quadrature nulling
Flader, Ian B., Ahn, Chae Hyuck, Ng, Eldwin J., Yushi Yang, Hong, Vu A., Kenny, Thomas W.
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
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Conference Proceeding
Encapsulated disk resonator gyroscope with differential internal electrodes
Chae HyuckAhn, Shin, Dongsuk D., Hong, Vu A., Yang, Yushi, Ng, Eldwin J., Yunhan Chen, Flader, Ian B., Kenny, Thomas W.
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
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Conference Proceeding
A unified epi-seal process for resonators and inertial sensors
Yang, Yushi, Ng, Eldwin J., Yunhan Chen, Flader, Ian B., Ahn, Chae Hyuck, Hong, Vu A., Kenny, Thomas W.
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
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Conference Proceeding
Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance
Flader, Ian B., Ahn, Chae H., Gerrard, Dustin D., Ng, Eldwin J., Yushi Yang, Hong, Vu A., Pavone, Marco, Kenny, Thomas W.
Published in 2016 American Control Conference (ACC) (01.07.2016)
Published in 2016 American Control Conference (ACC) (01.07.2016)
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Conference Proceeding
Journal Article