Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping
Rodriguez, J., Gerrard, D. D., Chandorkar, S., Chen, Y., Glaze, G. M., Flader, I. B., Ahn, C. H., Ng, E. J., Kenny, T. W.
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding
Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability
Maiwald, V., Chen, Y., Müller, M., Flader, I. B., Roman, C., Heinz, D. B., Shin, D. D., Kenny, T. W., Hierold, C.
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Get full text
Conference Proceeding