The long path from MEMS resonators to timing products
Ng, E., Yang, Y., Hong, V. A., Ahn, C. H., Heinz, D. B., Flader, I., Chen, Y., Everhart, C. L. M., Kim, B., Melamud, R., Candler, R. N., Hopcroft, M. A., Salvia, J. C., Yoneoka, S., Graham, A. B., Agarwal, M., Messana, M. W., Chen, K. L., Lee, H. K., Wang, S., Bahl, G., Qu, V., Chiang, C. F., Kenny, T. W., Partridge, A., Lutz, M., Yama, G., O'Brien, G. J.
Published in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2015)
Published in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2015)
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Conference Proceeding
A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope
Wisher, S., Shao, P., Norouzpour-Shirazi, A., Yang, Y., Ng, E., Flader, I., Chen, Y., Heinz, D., Kenny, T., Ayazi, F.
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
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Conference Proceeding
Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping
Rodriguez, J., Gerrard, D. D., Chandorkar, S., Chen, Y., Glaze, G. M., Flader, I. B., Ahn, C. H., Ng, E. J., Kenny, T. W.
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding
Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability
Maiwald, V., Chen, Y., Müller, M., Flader, I. B., Roman, C., Heinz, D. B., Shin, D. D., Kenny, T. W., Hierold, C.
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding