Optimizing the UHP gas distribution system for a plasma etch tool
Fine, Stephen M, McGuire, John T, Choi, Baik-Soon, Bzik, Thomas, Crofton, Kevin T, Melnyk, Andrew, Perez, Max, Sheriff, David P
Published in Solid state technology (01.03.1996)
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Published in Solid state technology (01.03.1996)
Magazine Article
Using organosilanes to inhibit adsorption in gas delivery systems
Fine, Stephen M, Johnson, Andrew D, Langan, John G, Choi, Baik-Soon, McGuire, John T
Published in Solid state technology (01.04.1996)
Get full text
Published in Solid state technology (01.04.1996)
Magazine Article
Optimizing the UHP gas distribution system for a plasma etch tool
Fine, Stephen M, McGuire, John T, Choi, Baik-Soon, Bzik, Thomas, Crofton, Kevin T, Melnyk, Andrew, Perez, Max, Sheriff, David P
Published in Solid state technology (01.01.1996)
Get full text
Published in Solid state technology (01.01.1996)
Magazine Article