Elemental profiling of laser cladded multilayer coatings by laser induced breakdown spectroscopy and energy dispersive X-ray spectroscopy
Lednev, V.N., Sdvizhenskii, P.A., Filippov, M.N., Grishin, M.Ya, Filichkina, V.A., Stavertiy, A.Ya, Tretyakov, R.S., Bunkin, A.F., Pershin, S.M.
Published in Applied surface science (15.09.2017)
Published in Applied surface science (15.09.2017)
Get full text
Journal Article
On some problems of mathematical modeling of diffusion of non-equilibrium minority charge carriers generated by kilovolt electrons in semiconductors
Stepovich, M A, Seregina, E V, Kalmanovich, V V, Filippov, M N
Published in Journal of physics. Conference series (01.01.2021)
Published in Journal of physics. Conference series (01.01.2021)
Get full text
Journal Article
Electron Probe X-Ray Spectral Analysis of Nanoparticles
Darznek, S. A., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N.
Published in Inorganic materials (01.12.2018)
Published in Inorganic materials (01.12.2018)
Get full text
Journal Article
Electron Probe X-Ray Analysis of Nanofilms at Off-Normal Incidence of the Electron Beam
Darznek, S. A., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N.
Published in Inorganic materials (01.12.2018)
Published in Inorganic materials (01.12.2018)
Get full text
Journal Article
An Estimate of the Uncertainty of Measurements of Lattice Spacings in Silicon Single Crystals Using a Laboratory x-Ray Diffractometer
Gavrilenko, V. P., Ermakova, M. A., Zablotskii, A. V., Kuzin, A. Yu, Todua, P. A., Filippov, M. N.
Published in Measurement techniques (01.03.2014)
Published in Measurement techniques (01.03.2014)
Get full text
Journal Article
Standard sample for calibration of transmission electron microscopes
Bodunov, D.S, Gavrilenko, V.P, Zablotskii, A.V, Kuzin, A.A, Kuzin, A. Yu, Mityukhlyaev, V.B, Rakov, A.V, Todua, P.A, Filippov, M.N
Published in Measurement techniques (01.01.2013)
Get full text
Published in Measurement techniques (01.01.2013)
Journal Article
Distortion of the Profile of Surface Relief Elements of Single-Crystal Silicon Caused by Contamination in a Low-Voltage Scanning Electron Microscope
Gavrilenko, V. P., Kuzin, A. Yu, Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N., Sharonov, V. A.
Published in Measurement techniques (01.06.2013)
Published in Measurement techniques (01.06.2013)
Get full text
Journal Article
Scan nonlinearity of a scanning electron microscope
Alzoba, V. V., Gavrilenko, V. P., Kuzin, A. Yu, Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N.
Published in Measurement techniques (01.12.2012)
Published in Measurement techniques (01.12.2012)
Get full text
Journal Article
Influence of contamination in scanning electron microscopes on the profile of relief elements in monocrystalline silicon
Gavrilenko, V. P., Kuzin, A. Yu, Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N., Sharonov, V. A.
Published in Measurement techniques (01.12.2012)
Published in Measurement techniques (01.12.2012)
Get full text
Journal Article
Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe
Alzoba, V. V., Kuzin, A. Yu, Larionov, Yu. V., Rakov, A. V., Todua, P. A., Filippov, M. N.
Published in Measurement techniques (01.11.2012)
Published in Measurement techniques (01.11.2012)
Get full text
Journal Article
Measurement of the thickness of natural oxide on a silicon relief step structure
Gavrilenko, V. P., Zablotskii, A. V., Kuzin, A. A., Kuzin, A. Yu, Kuz’min, A. A., Ermakova, M. A., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N.
Published in Measurement techniques (01.09.2013)
Published in Measurement techniques (01.09.2013)
Get full text
Journal Article
Measurement of the linear dimensions of nanorelief elements with a trapezoidal profile by defocusing the electron beam of a scanning electron microscope
Gavrilenko, V. P., Kuzin, A. Yu, Larionov, Yu. V., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N.
Published in Measurement techniques (01.08.2012)
Published in Measurement techniques (01.08.2012)
Get full text
Journal Article