Pulsed MO CVD Processes of MgO Layer Deposition from Mg(thd) 2
Kuchumov, Boris M., Shevtsov, Yuriy V., Semyannikov, Pyotr P., Filatov, Egor S., Igumenov, Igor K.
Published in ECS transactions (25.09.2009)
Published in ECS transactions (25.09.2009)
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Journal Article
Thermal Properties of Some Volatile Titanium (IV) Precursors
Filatov, Egor S., Nizard, Harry, Semyannikov, Pyotr P., Sysoev, Sergey V., Trubin, Sergey V., Morozova, Natalia B., Zherikova, Kseniya V., Gelfond, Nikolay V.
Published in ECS transactions (01.01.2009)
Published in ECS transactions (01.01.2009)
Get full text
Journal Article
Pulsed MOCVD Processes of MgO Layer Deposition from Mg(thd) 2
Kuchumov, Boris M., Shevtsov, Yuriy V., Semyannikov, Pyotr P., Filatov, Egor S., Igumenov, Igor K.
Published in Meeting abstracts (Electrochemical Society) (20.07.2009)
Published in Meeting abstracts (Electrochemical Society) (20.07.2009)
Get full text
Journal Article
Thermal Properties of Some Volatile Titanium(IV) Precursors
Filatov, Egor S., Nizard, Harry, Semyannikov, Pyotr P., Sysoev, Sergey V., Trubin, Sergey V., Morozova, Natalia B., Zherikova, Kseniya V., Gelfond, Nikolay V.
Published in Meeting abstracts (Electrochemical Society) (20.07.2009)
Published in Meeting abstracts (Electrochemical Society) (20.07.2009)
Get full text
Journal Article