Mechanical behavior of a novel resonant microstructure for magnetic applications considering the squeeze-film damping
Herrera-May, A. L., Aguilera-Cortés, L. A., García-Gonzalez, L., Figueras-Costa, E.
Published in Microsystem technologies : sensors, actuators, systems integration (01.02.2009)
Published in Microsystem technologies : sensors, actuators, systems integration (01.02.2009)
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Journal Article
A resonant magnetic field microsensor with high quality factor at atmospheric pressure
Herrera-May, A L, García-Ramírez, P J, Aguilera-Cortés, L A, Martínez-Castillo, J, Sauceda-Carvajal, A, García-González, L, Figueras-Costa, E
Published in Journal of micromechanics and microengineering (01.01.2009)
Published in Journal of micromechanics and microengineering (01.01.2009)
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Journal Article