Successful Demonstration of an Electrostatically Actuated Microshutter System for Space Telescope Flight Missions
Li, M. J., Aguayo, E., Brekosky, R. P., Burns, D. E., Carter, A., Chang, M. P., Costen, N. P., Fettig, R. K., Franz, D. E., Greenhouse, M. A., Hu, G., Kim, K., Kelly, D. P., Kotecki, C. A., Kutyrev, A. S., McCandliss, S. R., Miller, T. M., Moseley, S. H., Oh, L., Ray, K., Rodriguez, S., Wang, F., Welch, B.
Published in Journal of microelectromechanical systems (01.10.2020)
Published in Journal of microelectromechanical systems (01.10.2020)
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Journal Article
Mechanical property characterization of LPCVD silicon nitride thin films at cryogenic temperatures
Wen-Hsien Chuang, Luger, T., Fettig, R.K., Ghodssi, R.
Published in Journal of microelectromechanical systems (01.10.2004)
Published in Journal of microelectromechanical systems (01.10.2004)
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Journal Article
Successful Demonstration of an Electrostatic Actuated Microshutter System for Space Telescope Flight Missions
Li, M. J., Aguayo, E., Brekosky, R. P., Burns, D. E., Carter, A., Chang, M. P., Costen, N. P., Fettig, R. K., Franz, D. E., Greenhouse, M. A., Hu, G., Kim, K., Kelly, D. P., Kotecki, C. A., Kutyrev, A. S., McCandliss, S. R., Miller, T. M., Moseley, S. H., Oh, L., Ray, K., Rodriguez, S., Wang, F., Welch, B.
Published in Journal of microelectromechanical systems (08.07.2020)
Published in Journal of microelectromechanical systems (08.07.2020)
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Journal Article
An electrostatic actuator for fatigue testing of low-stress LPCVD silicon nitride thin films
Chuang, Wen-Hsien, Fettig, Rainer K., Ghodssi, Reza
Published in Sensors and actuators. A. Physical. (30.06.2005)
Published in Sensors and actuators. A. Physical. (30.06.2005)
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Journal Article
Redshift Estimation from Low‐Resolution Prism Spectral Energy Distributions with a Next Generation Space Telescope Multiobject Spectrograph
Teplitz, Harry I., Malumuth, Eliot, Woodgate, Bruce E., Moseley, S. Harvey, Gardner, Jonathan P., Kimble, Randy A., Bowers, Charles W., Kutyrev, Alexander S., Fettig, Rainer K., Wesenberg, Richard P., Mentzell, Eric E.
Published in Publications of the Astronomical Society of the Pacific (01.09.2000)
Published in Publications of the Astronomical Society of the Pacific (01.09.2000)
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Journal Article
Fatigue study of nano-scale silicon nitride thin films using a novel electrostatic actuator
Wen-Hsien Chuang, Fettig, R.K., Ghodssi, R.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding