Characterization and control of energetic deposits from hexachlorodisilane in process tool exhaust lines
Nguyen, Thanh-Trung, Lin, Yu-Jhen, Chin, Mo-Geng, Wang, Cheng-Chieh, Tsai, Hsiao-Yun, Chen, Jenq-Renn, Ngai, Eugene Y., Chacon, Jennyfer, Franzi, Albert, Fifield, Christian, Baylor, Jason, Marci, John, Bitner, Justin, Prettyman, Kevin M., Ferrera, Nicholas, Jordon, William, Szekeres, Trevor
Published in Journal of loss prevention in the process industries (01.05.2020)
Published in Journal of loss prevention in the process industries (01.05.2020)
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