A 230 MHz CMOS-MEMS bulk acoustic wave resonator
MARIGO FERRER, Eloi, MUNOZ-GAMARRA, J. L, GINER, J, URANGA, A, BARNIOL, N
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Conference Proceeding
Design of a MEMS-Based Oscillator Using 180nm CMOS Technology
Roy, Sukanta, Ramiah, Harikrishnan, Reza, Ahmed Wasif, Lim, Chee Cheow, Ferrer, Eloi Marigo
Published in PloS one (08.07.2016)
Published in PloS one (08.07.2016)
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Journal Article
A 230MHz CMOS-MEMS bulk acoustic wave resonator
Ferrer, Eloi Marigó, Muñoz-Gamarra, J.L., Giner, J., Uranga, A., Barniol, N.
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Journal Article
Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes
Aslam, Muhammad Zubair, Jeoti, Varun, Karuppanan, Saravanan, Pandian, Mohanraj Soundara, Ferrer, Eloi Marigo, Suresh, Kasyap
Published in Sensors and actuators. A. Physical. (01.10.2020)
Published in Sensors and actuators. A. Physical. (01.10.2020)
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Journal Article
Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging
Ferrer, Eloi Marigo, Pandian, Mohanraj Soundara, Uranga, Arantxa, Barniol, Nuria, Tay, Wee Song, Fei, Chan Buan
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
Thin film piezoelectric devices integrated on CMOS
Soundara Pandian, Mohanraj, Ferrer, Eloi Marigo, Tay, Wee Song, Madhaven, Venkatesh, Kantimahanti, Arjun Kumar, Sobreviela, Guillermo, Uranga, Arantxa, Barniol, Nuria
Published in 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) (01.10.2016)
Published in 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) (01.10.2016)
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Conference Proceeding
Piezoelectric characteristics of CMOS compatible AIN SAW resonators
Ralib, Aliza Aini Md, Pandian, Mohanraj Soundara, Ferrer, Eloi Marigo, Song, Charlie TayWee, Shunmugam, Muniandy, Zainuddin, Ahmad Anwar Bin, Nordin, Anis Nurashikin
Published in 2014 Asia-Pacific Microwave Conference (01.11.2014)
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Published in 2014 Asia-Pacific Microwave Conference (01.11.2014)
Conference Proceeding