A SYSTEM, A LITHOGRAPHIC APPARATUS, AND A METHOD FOR REDUCING OXIDATION OR REMOVING OXIDE ON A SUBSTRATE SUPPORT
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Year of Publication 13.12.2023
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Year of Publication 13.12.2023
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System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support
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Year of Publication 10.08.2021
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Year of Publication 10.08.2021
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A SYSTEM, A LITHOGRAPHIC APPARATUS, AND A METHOD FOR REDUCING OXIDATION OR REMOVING OXIDE ON A SUBSTRATE SUPPORT
STEVENS, Lucas Henricus Johannes, FERNANDEZ DIAZ, Laura Maria, PIJNENBURG, Johannes Adrianus Cornelis Maria, DZIOMKINA, Nina Vladimirovna
Year of Publication 14.05.2020
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Year of Publication 14.05.2020
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A SYSTEM, A LITHOGRAPHIC APPARATUS, AND A METHOD FOR REDUCING OXIDATION OR REMOVING OXIDE ON A SUBSTRATE SUPPORT
STEVENS, Lucas Henricus Johannes, FERNANDEZ DIAZ, Laura Maria, PIJNENBURG, Johannes Adrianus Cornelis Maria, DZIOMKINA, Nina Vladimirovna
Year of Publication 06.05.2020
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Year of Publication 06.05.2020
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Lithographic apparatus and a device manufacturing method
Soethoudt, Abraham Alexander, Stevens, Lucas Henricus Johannes, Harberts, Dirk Willem, Fernandez Diaz, Laura Maria, Poiesz, Thomas, Welters, Wilhelmus Jacobus Johannes, Scholten, Bert Dirk, Pijnenburg, Johannes Adrianus Cornelis Maria, Van De Winkel, Jimmy Matheus Wilhelmus
Year of Publication 08.03.2022
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Year of Publication 08.03.2022
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LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
Soethoudt, Abraham Alexander, Stevens, Lucas Henricus Johannes, Harberts, Dirk Willem, Fernandez Diaz, Laura Maria, Poiesz, Thomas, Welters, Wilhelmus Jacobus Johannes, Scholten, Bert Dirk, Pijnenburg, Johannes Adrianus Cornelis M, Van De Winkel, Jimmy Matheus Wilhelmus
Year of Publication 11.03.2021
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Year of Publication 11.03.2021
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Lithographic apparatus and a device manufacturing method
Soethoudt, Abraham Alexander, Stevens, Lucas Henricus Johannes, Harberts, Dirk Willem, Fernandez Diaz, Laura Maria, Poiesz, Thomas, Welters, Wilhelmus Jacobus Johannes, Scholten, Bert Dirk, Pijnenburg, Johannes Adrianus Cornelis Maria, Van De Winkel, Jimmy Matheus Wilhelmus
Year of Publication 22.12.2020
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Year of Publication 22.12.2020
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LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
SCHOLTEN, Bert Dirk, STEVENS, Lucas Henricus Johannes, WELTERS, Wilhelmus Jacobus Johannes, FERNANDEZ DIAZ, Laura Maria, PIJNENBURG, Johannes Adrianus Cornelis Maria, HARBERTS, Dirk Willem, VAN DE WINKEL, Jimmy Matheus Wilhelmus, POIESZ, Thomas, SOETHOUDT, Abraham Alexander
Year of Publication 11.06.2020
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Year of Publication 11.06.2020
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A Lithographic Apparatus and a Device Manufacturing Method
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Year of Publication 21.12.2018
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Year of Publication 21.12.2018
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Substrate table, lithographic apparatus and liquid confinement system
WILHELMUS JACOBUS JOHANNES WELTERS, LAURA MARIA FERNANDEZ DIAZ, DIRK WILLEM HARBERTS, JOHANNES ADRIANUS CORNELIS MARIA PIJNENBURG, SOETHOUDT ABRAHAM ALEXANDER, POIESZ THOMAS, BERT DIRK SCHOLTEN, LUCAS HENRICUS JOHANNES STEVENS, VAN DE WINKEL JIMMY M W
Year of Publication 04.05.2021
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Year of Publication 04.05.2021
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Liquid confinement system for an immersion system and related lithographic apparatus
SOETHOUDT, ABRAHAM ALEXANDER, SCHOLTEN, BERT DIRK, HARBERTS, DIRK WILLEM, STEVENS, LUCAS HENRICUS JOHANNES, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, POIESZ, THOMAS, PIJNENBURG, JOHANNES ADRIANUS CORNELIS MARIA, WELTERS, WILHELMUS JACOBUS JOHANNES, FERNANDEZ DIAZ, LAURA MARIA
Year of Publication 11.02.2021
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Year of Publication 11.02.2021
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Substrate table for an immersion system
SOETHOUDT, ABRAHAM ALEXANDER, SCHOLTEN, BERT DIRK, HARBERTS, DIRK WILLEM, STEVENS, LUCAS HENRICUS JOHANNES, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, POIESZ, THOMAS, PIJNENBURG, JOHANNES ADRIANUS CORNELIS MARIA, WELTERS, WILHELMUS JACOBUS JOHANNES, FERNANDEZ DIAZ, LAURA MARIA
Year of Publication 21.07.2020
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Year of Publication 21.07.2020
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