Advanced aqueous wafer cleaning in power semiconductor device manufacturing
Ridley, R.S., Grebs, T., Trost, J., Webb, R., Schuler, M., Longenberger, R.F., Fenstemacher, T., Caravaggio, M.
Published in IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) (1998)
Published in IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) (1998)
Get full text
Conference Proceeding