Etching of step-bunched Si(1 1 1) surface by Se molecular beam observed by in situ REM
Rogilo, D.I., Fedina, L.I., Ponomarev, S.A., Sheglov, D.V., Latyshev, A.V.
Published in Journal of crystal growth (01.01.2020)
Published in Journal of crystal growth (01.01.2020)
Get full text
Journal Article
Near-field infrared spectroscopy of SiOx nanowires
Milekhin, I.A., Kozhukhov, A.S., Sheglov, D.V., Fedina, L.I., Milekhin, A.G., Latyshev, A.V., Zahn, D.R.T.
Published in Applied surface science (15.05.2022)
Published in Applied surface science (15.05.2022)
Get full text
Journal Article
On the role of mobile nanoclusters in 2D island nucleation on Si(111)-(7 × 7) surface
Rogilo, D.I., Fedina, L.I., Kosolobov, S.S., Latyshev, A.V.
Published in Surface science (01.01.2018)
Published in Surface science (01.01.2018)
Get full text
Journal Article
Luminescent and Structural Properties of Electron-Irradiated Silicon Light-Emitting Diodes with Dislocation-Related Luminescence
Sobolev, N.A., Kalyadin, A.E., Shek, E.I., Shtel makh, K.F., Gutakovskii, A.K., Vdovin, V.I., Mikhaylov, A.N., Tetel'baum, D.I., Li, D., Yang, D., Fedina, L.I.
Published in Materials today : proceedings (2018)
Published in Materials today : proceedings (2018)
Get full text
Journal Article
Precipitation of boron in silicon on high-dose implantation
Feklistov, K. V., Fedina, L. I., Cherkov, A. G.
Published in Semiconductors (Woodbury, N.Y.) (01.03.2010)
Published in Semiconductors (Woodbury, N.Y.) (01.03.2010)
Get full text
Journal Article
Gas-jet electron beam plasma chemical vapor deposition method for solar cell application
Sharafutdinov, R.G., Khmel, S.Ya, Shchukin, V.G., Ponomarev, M.V., Baranov, E.A., Volkov, A.V., Semenova, O.I., Fedina, L.I., Dobrovolsky, P.P., Kolesov, B.A.
Published in Solar energy materials and solar cells (15.11.2005)
Published in Solar energy materials and solar cells (15.11.2005)
Get full text
Journal Article
Consecutive stages of redistribution of oxygen implanted in silicon heavily doped with boron
Obodnikov, V.I., Tishkovsky, E.G., Cherkov, A.G., Fedina, L.I.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.10.2006)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.10.2006)
Get full text
Journal Article
DLTS study of oxygen precipitates in silicon annealed at high pressure
Antonova, I.V., Misiuk, A., Popov, V.P., Fedina, L.I., Shaimeev, S.S.
Published in Physica. B, Condensed matter (01.07.1996)
Published in Physica. B, Condensed matter (01.07.1996)
Get full text
Journal Article
The structure and morphology of Si (111) surface at the initial stages of high temperature copper deposition
Rogilo, D.I., Kosolobov, S.S., Fedina, L.I., Latyshev, A.V.
Published in 2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (01.07.2009)
Published in 2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (01.07.2009)
Get full text
Conference Proceeding
The structure of GeO2 films grown on Ge
Edelman, F.L., Alexandrov, L.N., Fedina, L.I., Latuta, V.S.
Published in Thin solid films (04.05.1976)
Published in Thin solid films (04.05.1976)
Get full text
Journal Article
METHOD OF INTERIOR GETTERING SETTING ON SILICON PLATE
FEDINA L.I.,SU, DENISOV V.L.,SU, TEPMAN B.G.,SU, GOROKHOV E.B.,SU, ASEEV A.L.,SU, CHULININA L.P.,SU, TRISHCHUNKIN V.F.,SU, BELTS A.N.,SU
Year of Publication 23.09.1992
Get full text
Year of Publication 23.09.1992
Patent