Incoherent-light pulse annealing of nanoporous germanium layers formed by ion implantation
Stepanov, A.L., Farrakhov, B.F., Fattakhov, Ya.V., Rogov, A.M., Konovalov, D.A., Nuzhdin, V.I., Valeev, V.F.
Published in Vacuum (01.04.2021)
Published in Vacuum (01.04.2021)
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Journal Article
Investigation of structural–phase transitions dynamics on the surface of implanted silicon at rapid thermal processing
Fattakhov, Ya.V., Galyautdinov, M.F., L’vova, T.N., Zakharov, M.V., Khaibullin, I.B.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2007)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2007)
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Journal Article