Ellipsometry for cSiGe metrology
Farhat, Saiqa, Rangarajan, Srinivasan, Mcardle, Timothy J., Steigerwalt, Michael, Dawei Hu, Ming Dai
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
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Conference Proceeding
Silicon-Germanium (SiGe) composition and thickness determination via simultaneous smallspot XPS and XRF measurements
L'herron, Benoit, Loubet, Nicolas, Qing Liu, Wei Ti Lee, Klare, Mark, Pois, Heath, Kwan, Mike, Ying Wang, Larson, Tom, Farhat, Saiqa, Fullam, Jennifer, Gaudiello, John, Rangarajan, Srinivasan, Bing Sun, Wacquez, Romain, Maitrejean, Sylvian
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
Get full text
Conference Proceeding