Parasitic Resistance Reduction for Aggressively Scaled Stacked Nanosheet Transistors
Fan, Su-Chen, Xie, Ruilong, Wu, Heng, Liu, Zuoguang, Frougier, Julien, Greene, Andrew, Pancharatnam, Shanti, Bhosale, Prasad, Mochizuki, Shogo, Zhang, Jingyun, Sankarapandian, M., Wynne, Jean, Loubet, Nicolas, Basker, Veeraraghavan S, Guo, Dechao, Haran, Bala, Bu, Huiming
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
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Conference Proceeding
The impact of scaling on metal thickness for advanced back end of line interconnects
Chen, Hsueh-Chung, Fan, Su-Chen, Lin, Jian-Hong, Cheng, Yi-Lung, Jeng, Shin-Puu, Wu, Chii-Ming
Published in Thin solid films (22.12.2004)
Published in Thin solid films (22.12.2004)
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Journal Article
Serum and tissue trace elements in patients with breast cancer in Taiwan
Kuo, Hsien Wen, Chen, Su Fan, Wu, Chin Ching, Chen, Dar Ren, Lee, Jau Hung
Published in Biological trace element research (01.10.2002)
Published in Biological trace element research (01.10.2002)
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Journal Article
Middle of line RC performance study at the 7 nm node
Fan, Susan Su-Chen, Chen, James Hsueh-Chung, Kamineni, Vimal Kumar, Xunyuan Zhang, Raymond, Mark, Labelle, Cathy
Published in 2017 IEEE International Interconnect Technology Conference (IITC) (01.05.2017)
Published in 2017 IEEE International Interconnect Technology Conference (IITC) (01.05.2017)
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Conference Proceeding
Gas cluster ion beam processing for improved self aligned contact yield at 7 nm node FinFET: MJ: MOL and junction interfaces
Fan, Su Chen, Teehan, Sean, Chung, Kisup, Varghese, Alex, Lenhardt, Mark, Montanini, Pietro, Skordas, Spyridon, Haran, Bala, Tsai, Stan, Xie, Ruilong
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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Conference Proceeding
REDUCED GATE TOP CD WITH WRAP-AROUND GATE CONTACT
Xie, Ruilong, Fan, Su Chen, Frougier, Julien, Ramachandran, Ravikumar
Year of Publication 18.04.2024
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Year of Publication 18.04.2024
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