A comprehensive model of beams' anisoelasticity in MEMS gyroscopes, with focus on the effect of axial non-vertical etching
Izadi, M., Braghin, F., Giannini, D., Milani, D., Resta, F., Brunetto, M. F., Falorni, L. G., Gattere, G., Guerinoni, L., Valzasina, C.
Published in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2018)
Published in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2018)
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