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"FUTATSUGI TETSUYA"
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"FUTATSUGI TETSUYA"
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CLEANING JIG, CLEANING JIG SET, CLEANING SUBSTRATE, CLEANING METHOD, AND SUBSTRATE PROCESSING DEVICE
by
HIGUCHI AYUMI
,
SHIMANO TATSUYA
,
HONSHO KAZUHIRO
,
FUTATSUGI TETSUYA
,
TAKAHASHI MITSUKAZU
,
YOSHIZUMI ASUKA
Year of Publication
05.03.2015
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Jig for cleaning, jig set for cleaning, substrate for cleaning, cleaning method and substrate processing apparatus
by
HIGUCHI, AYUMI
,
YOSHIZUMI, ASUKA
,
SHIMANO, TATSUYA
,
HONSHO, KAZUHIRO
,
TAKAHASHI, MITSUKAZU
,
FUTATSUGI
,
TETSUYA
Year of Publication
01.10.2017
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Jig for cleaning, jig set for cleaning, substrate for cleaning, cleaning method and substrate processing apparatus
by
HIGUCHI, AYUMI
,
YOSHIZUMI, ASUKA
,
SHIMANO, TATSUYA
,
HONSHO, KAZUHIRO
,
TAKAHASHI, MITSUKAZU
,
FUTATSUGI
,
TETSUYA
Year of Publication
01.06.2015
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Patent
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basic electric elements
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electric solid state devices not otherwise provided for
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cleaning
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