Search Results - "FUSEGAWA KAZUHIRO" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Evaluation of thermally activated defects behaviors in nitrogen-doped Czochralski silicon single crystals using deep level transient spectroscopy

Evaluation of thermally activated defects behaviors in nitrogen-doped Czochralski silicon single crystals using deep level transient spectroscopy

by Kajiwara, Kaoru, Eriguchi, Kazutaka, Fusegawa, Kazuhiro, Mitsugi, Noritomo, Samata, Shuichi, Torigoe, Kazuhisa, Harada, Kazuhiro, Hourai, Masataka, Nishizawa, Shin-ichi
Published in Japanese Journal of Applied Physics (01.07.2023)

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Journal Article

Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors

Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors

by Kajiwara, Kaoru, Eriguchi, Kazutaka, Fusegawa, Kazuhiro, Mitsugi, Noritomo, Samata, Shuichi, Torigoe, Kazuhisa, Harada, Kazuhiro, Hourai, Masataka, Nishizawa, Shin-Ichi
Published in IEEE transactions on semiconductor manufacturing (01.11.2022)

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Journal Article

N+p Junction Leakage Current in p/p+ Epitaxial Wafers

N+p Junction Leakage Current in p/p+ Epitaxial Wafers

by Murakami, Yoshio, Fusegawa, Kazuhiro, Matsukawa, Kazuhiro
Published in Japanese Journal of Applied Physics (2003)

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Journal Article

METHOD FOR DETERMINATING CUTTING WIDTH OF POLYCRYSTALLINE SILICON INGOT AND METHOD FOR MANUFACTURING POLYCRYSTALLINE SILICON

METHOD FOR DETERMINATING CUTTING WIDTH OF POLYCRYSTALLINE SILICON INGOT AND METHOD FOR MANUFACTURING POLYCRYSTALLINE SILICON

by FUSEGAWA KAZUHIRO
Year of Publication 07.06.2012

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Patent

METHOD OF MANUFACTURING WAFER FOR SOLAR BATTERY, AND METHOD OF MANUFACTURING SOLAR BATTERY CELL

METHOD OF MANUFACTURING WAFER FOR SOLAR BATTERY, AND METHOD OF MANUFACTURING SOLAR BATTERY CELL

by FUSEGAWA KAZUHIRO
Year of Publication 31.10.2013

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Patent

DETERMINATION METHOD OF CUTTING WIDTH OF POLYCRYSTALLINE SILICON INGOT AND MANUFACTURING METHOD OF POLYCRYSTALLINE SILICON

DETERMINATION METHOD OF CUTTING WIDTH OF POLYCRYSTALLINE SILICON INGOT AND MANUFACTURING METHOD OF POLYCRYSTALLINE SILICON

by FUSEGAWA KAZUHIRO
Year of Publication 21.06.2012

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Patent

PREPROCESSING METHOD FOR RECOMBINATION LIFETIME EVALUATION

PREPROCESSING METHOD FOR RECOMBINATION LIFETIME EVALUATION

by FUSEGAWA KAZUHIRO
Year of Publication 24.12.2009

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Patent

WAFER INSPECTION METHOD AND EQUIPMENT THEREOF

WAFER INSPECTION METHOD AND EQUIPMENT THEREOF

by FUSEGAWA KAZUHIRO
Year of Publication 26.04.2007

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Patent

QUALITY EVALUATING METHOD OF EPITAXIAL LAYER, QUALITY EVALUATING METHOD OF SOI (SILICON ON INSULATOR) LAYER AND MANUFACTURING METHOD OF SILICON WAFER

QUALITY EVALUATING METHOD OF EPITAXIAL LAYER, QUALITY EVALUATING METHOD OF SOI (SILICON ON INSULATOR) LAYER AND MANUFACTURING METHOD OF SILICON WAFER

by FUSEGAWA KAZUHIRO
Year of Publication 15.02.2007

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Patent

QUANTITATIVE ANALYSIS LIMIT DETERMINATION METHOD IN IRON CONCENTRATION ANALYSIS IN BORON-DOPED P-TYPE SILICON

QUANTITATIVE ANALYSIS LIMIT DETERMINATION METHOD IN IRON CONCENTRATION ANALYSIS IN BORON-DOPED P-TYPE SILICON

by KUBOTA TSUYOSHI, FUSEGAWA KAZUHIRO
Year of Publication 17.03.2011

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Patent

METHOD OF EVALUATING SILICON WAFER AND METHOD OF MANUFACTURING THE SAME

METHOD OF EVALUATING SILICON WAFER AND METHOD OF MANUFACTURING THE SAME

by SHIBAYAMA TAKASHI, FUSEGAWA KAZUHIRO
Year of Publication 11.03.2010

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Patent

INSPECTION METHOD OF SILICON WAFER

INSPECTION METHOD OF SILICON WAFER

by MURAKAMI YOSHIO, FUSEGAWA KAZUHIRO
Year of Publication 11.03.2010

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Patent

MASK FOR VAPOR DEPOSITION, METHOD FOR PRODUCING VAPOR-DEPOSITION PATTERN USING THE SAME, METHOD FOR PRODUCING SAMPLE FOR EVALUATING SEMICONDUCTOR WAFER, METHOD FOR EVALUATING SEMICONDUCTOR WAFER, AND METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER

MASK FOR VAPOR DEPOSITION, METHOD FOR PRODUCING VAPOR-DEPOSITION PATTERN USING THE SAME, METHOD FOR PRODUCING SAMPLE FOR EVALUATING SEMICONDUCTOR WAFER, METHOD FOR EVALUATING SEMICONDUCTOR WAFER, AND METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER

by MIYAZAKI SUMIO, FUSEGAWA KAZUHIRO
Year of Publication 29.10.2009

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Patent

METHOD OF MEASURING RECOMBINATION LIFE TIME IN SEMICONDUCTOR WAFER

METHOD OF MEASURING RECOMBINATION LIFE TIME IN SEMICONDUCTOR WAFER

by KUBOTA TSUYOSHI, TANIGAWA FUMINARI, FUSEGAWA KAZUHIRO
Year of Publication 02.09.2010

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Patent

INSPECTION METHOD OF SILICON WAFER AND APPARATUS THEREFOR

INSPECTION METHOD OF SILICON WAFER AND APPARATUS THEREFOR

by MURAKAMI YOSHIO, FUSEGAWA KAZUHIRO
Year of Publication 09.09.2004

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Patent

SILICON CARBIDE WAFER

SILICON CARBIDE WAFER

by IKEDA NAOKI, ASAYAMA HIDEKAZU, FUSEGAWA KAZUHIRO
Year of Publication 08.10.2009

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Patent

MEASURING APPARATUS FOR DIELECTRIC WITHSTAND VOLTAGE

MEASURING APPARATUS FOR DIELECTRIC WITHSTAND VOLTAGE

by FUSEGAWA KAZUHIRO
Year of Publication 29.06.1992

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Patent

WAFER FOR HEAT TREAT FURNACE EVALUATION, HEAT TREATMENT FURNACE EVALUATION METHOD, AND SEMICONDUCTOR WAFER MANUFACTURING METHOD

WAFER FOR HEAT TREAT FURNACE EVALUATION, HEAT TREATMENT FURNACE EVALUATION METHOD, AND SEMICONDUCTOR WAFER MANUFACTURING METHOD

by TAKAO HIROYUKI, KUBOTA TSUYOSHI, SADAMITSU SHINSUKE, FUSEGAWA KAZUHIRO
Year of Publication 18.02.2010

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Patent

SURGE ABSORPTION DEVICE

SURGE ABSORPTION DEVICE

by MURAKAMI YOSHIO, FUSEGAWA KAZUHIRO
Year of Publication 25.09.1998

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Patent

SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME

SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME

by KAMIYAMA, EIJI, FUSEGAWA, KAZUHIRO, TOYAMA, NOSHO
Year of Publication 15.10.1998

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Patent