Capacitive MEMS Accelerometer With Perforated and Electrically Separated Mass Structure for Low Noise and Low Power
Kamada, Yudai, Isobe, Atsushi, Oshima, Takashi, Furubayashi, Yuki, Ido, Tatemi, Sekiguchi, Tomonori
Published in Journal of microelectromechanical systems (01.06.2019)
Published in Journal of microelectromechanical systems (01.06.2019)
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Journal Article
A 22-ng/[Formula Omitted]Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques
Furubayashi, Yuki, Oshima, Takashi, Yamawaki, Taizo, Watanabe, Keiki, Mori, Keijiro, Mori, Naoki, Matsumoto, Akira, Kamada, Yudai, Isobe, Atsushi, Sekiguchi, Tomonori
Published in IEEE journal of solid-state circuits (01.09.2020)
Published in IEEE journal of solid-state circuits (01.09.2020)
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Journal Article
Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers
Isobe, Atsushi, Kamada, Yudai, Takubo, Chisaki, Furubayashi, Yuki, Oshima, Takashi, Sakuma, Noriyuki, Sekiguchi, Tomonori
Published in IEEE sensors journal (01.02.2020)
Published in IEEE sensors journal (01.02.2020)
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Journal Article