Epitaxially coated semiconductor wafer and process for producing it
MESSMANN KLAUS, HEIER GERHARD, FURFANGER MARTIN, WENSKI GUIDO, ALTMANN THOMAS, SIEBERT WOLFGANG
Year of Publication 02.10.2003
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Year of Publication 02.10.2003
Patent
Epitaxially coated semiconductor wafer and process for producing it
Siebert, Wolfgang, Wenski, Guido, Messmann, Klaus, Heier, Gerhard, Altmann, Thomas, Furfanger, Martin
Year of Publication 02.10.2003
Get full text
Year of Publication 02.10.2003
Patent