In situ CMP monitoring technique for multi-layer interconnection
Fukuroda, A., Nakamura, K., Arimoto, Y.
Published in Proceedings of International Electron Devices Meeting (1995)
Published in Proceedings of International Electron Devices Meeting (1995)
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Conference Proceeding
High-speed epitaxial base transistors on bonded SOI
Kojima, M., Fukuroda, A., Fukano, T., Higaki, T., Yamazaki, T., Sugii, T., Arimoto, Y., Ito, T.
Published in Proceedings of the 1991 Bipolar Circuits and Technology Meeting (1991)
Published in Proceedings of the 1991 Bipolar Circuits and Technology Meeting (1991)
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Conference Proceeding
One-electron capture processes in Ne2+-H2 collisions
Fukuroda, A, Kobayashi, N, Kaneko, Y
Published in Journal of physics. B, Atomic, molecular, and optical physics (14.11.1989)
Published in Journal of physics. B, Atomic, molecular, and optical physics (14.11.1989)
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Journal Article
High-resolution study of one-electron capture processes in Kr2+(1D)-Ne collisions
Fukuroda, A, Kobayashi, N, Kaneko, Y
Published in Journal of physics. B, Atomic, molecular, and optical physics (14.11.1989)
Published in Journal of physics. B, Atomic, molecular, and optical physics (14.11.1989)
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Journal Article
High-resolution study of one-electron capture processes in Kr 2+ ( 1 D)-Ne collisions
Fukuroda, A, Kobayashi, N, Kaneko, Y
Published in Journal of physics. B, Atomic, molecular, and optical physics (14.11.1989)
Published in Journal of physics. B, Atomic, molecular, and optical physics (14.11.1989)
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Journal Article
One-electron capture processes in Ne 2+ -H 2 collisions
Fukuroda, A, Kobayashi, N, Kaneko, Y
Published in Journal of physics. B, Atomic, molecular, and optical physics (14.11.1989)
Published in Journal of physics. B, Atomic, molecular, and optical physics (14.11.1989)
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Journal Article
Si wafer bonding with Ta silicide formation
FUKURODA, A, SUGII, T, ARIMOTO, Y, ITO, T
Published in Japanese Journal of Applied Physics (01.10.1991)
Published in Japanese Journal of Applied Physics (01.10.1991)
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Journal Article
A new SOI-lateral bipolar transistor for high-speed operation
SUGII, T, KOJIMA, M, FUKURODA, A, FUKANO, T, ARIMOTO, Y
Published in Japanese Journal of Applied Physics (01.12.1991)
Published in Japanese Journal of Applied Physics (01.12.1991)
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Journal Article
A Thin-Base Lateral Bipolar Transistor Fabricated on Bonded SOI
Higaki, N., Fukano, T., Fukuroda, A., Sugii, T., Arimoto, Y., Ito, T.
Published in 1991 Symposium on VLSI Technology (1991)
Published in 1991 Symposium on VLSI Technology (1991)
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Conference Proceeding