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Year of Publication 10.11.2010
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Year of Publication 02.11.2010
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Method for cutting semiconductor substrate
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Year of Publication 13.10.2010
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A method of cutting an object along two different directions using elliptically polarised laser beam
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Year of Publication 18.08.2010
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Year of Publication 12.08.2010
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Method of cutting semiconductor substrate
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Year of Publication 11.08.2010
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Laser processing apparatus and method with focusing adjustments achieved with low laser power output
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Year of Publication 21.07.2010
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